Issued Patents All Time
Showing 1–25 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266554 | Substrate processing apparatus | Roumen Botev | 2025-04-01 |
| 12206342 | Substrate processing apparatus | Vincent W. Tsang, Karanjit Singh Saini, Robert T. Caveney, Robert C. May, Daniel Babbs | 2025-01-21 |
| 11978649 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew | 2024-05-07 |
| 11972965 | Method and apparatus for substrate transport apparatus position compensation | Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2024-04-30 |
| 11923729 | Position feedback for sealed environments | Reza Saeidpourazar, Branden Gunn, Matthew W. Coady, Ulysses Gilchrist | 2024-03-05 |
| 11908721 | Tool auto-teach method and apparatus | Aaron Gawlik, Reza Saeidpourazar | 2024-02-20 |
| 11862498 | Substrate processing apparatus | Roumen Botev | 2024-01-02 |
| 11821953 | Method and apparatus for brushless electrical machine control | Nathan Spiker, Aaron Gawlik, Jayaraman Krishnasamy | 2023-11-21 |
| 11810801 | Robot embedded vision apparatus | — | 2023-11-07 |
| 11799346 | Sealed robot drive | Ulysses Gilchrist, Robert T. Caveney | 2023-10-24 |
| 11787058 | Method and apparatus for health assessment of a transport apparatus | Aaron Gawlik | 2023-10-17 |
| 11776834 | On the fly automatic wafer centering method and apparatus | Bing Yin, Vincent W. Tsang, Aaron Gawlik, Nathan Spiker | 2023-10-03 |
| 11670534 | Transport apparatus and adapter pendant | Dana L. Atwood | 2023-06-06 |
| 11508597 | High speed substrate aligner apparatus | Martin Hosek, Todd Bottomley, Ulysses Gilchrist | 2022-11-22 |
| 11476139 | Substrate process apparatus | Roumen Botev | 2022-10-18 |
| 11469126 | Tool auto-teach method and apparatus | Aaron Gawlik, Reza Saeidpourazar | 2022-10-11 |
| 11444521 | Sealed switched reluctance motor | Jayaraman Krishnasamy | 2022-09-13 |
| 11420337 | Transport apparatus | Ulysses Gilchrist | 2022-08-23 |
| 11404939 | Position feedback for sealed environments | Reza Saeidpourazar, Branden Gunn, Matthew W. Coady, Ulysses Gilchrist | 2022-08-02 |
| 11338437 | Method and apparatus for health assessment of a transport apparatus | Aaron Gawlik | 2022-05-24 |
| 11251059 | Method and apparatus for substrate transport apparatus position compensation | Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2022-02-15 |
| 11195738 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew | 2021-12-07 |
| 11181582 | Method and apparatus for brushless electrical machine control | Nathan Spiker, Aaron Gawlik, Jayaraman Krishnasamy | 2021-11-23 |
| 11164769 | Robot embedded vision apparatus | — | 2021-11-02 |
| 11002566 | Position feedback for self bearing motor | Martin Hosek, Jay Krishnasamy, Jeff Paranay | 2021-05-11 |