| 11978649 |
Substrate processing apparatus |
Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Jairo T. Moura |
2024-05-07 |
| 11195738 |
Substrate processing apparatus |
Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Jairo T. Moura |
2021-12-07 |
| 10600665 |
Substrate processing apparatus |
Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Jairo T. Moura |
2020-03-24 |
| 10325795 |
Substrate processing apparatus |
Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Jairo T. Moura |
2019-06-18 |
| 9852935 |
Substrate processing apparatus |
Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Jairo T. Moura |
2017-12-26 |
| 9230841 |
Substrate processing apparatus |
Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Jairo T. Moura |
2016-01-05 |
| 9117859 |
Compact processing apparatus |
Alexander Krupyshev |
2015-08-25 |
| 8918203 |
Substrate processing apparatus |
Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Jairo T. Moura |
2014-12-23 |
| 6719517 |
Substrate processing apparatus with independently configurable integral load locks |
David Beaulieu, Douglas R. Adams, Peter van der Meulen |
2004-04-13 |
| 5664925 |
Batchloader for load lock |
Richard S. Muka, Michael W. Pippins |
1997-09-09 |
| 5613821 |
Cluster tool batchloader of substrate carrier |
Richard S. Muka, Michael W. Pippins |
1997-03-25 |
| 5607276 |
Batchloader for substrate carrier on load lock |
Richard S. Muka, Michael W. Pippins |
1997-03-04 |