Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8669540 | System and method for gas leak control in a substrate holder | Timothy J. Miller, Julian G. Blake | 2014-03-11 |
| 8585115 | Method and apparatus for lifting a horizontally-oriented substrate from a cassette | John Robert Fairhurst, Jeffrey E. Krampert, Richard J. Hertel | 2013-11-19 |
| 8450193 | Techniques for temperature-controlled ion implantation | Jonathan Gerald England, Edwin Arevalo, Ziwei Fang, Vikram Singh | 2013-05-28 |
| 8319196 | Technique for low-temperature ion implantation | Jonathan Gerald England, Steven R. Walther, Julian G. Blake, Paul J. Murphy, Reuel B. Liebert | 2012-11-27 |
| 7993698 | Techniques for temperature controlled ion implantation | Julian G. Blake, Jonathan Gerald England, Scott C. Holden, Steven R. Walther, Reuel B. Liebert +4 more | 2011-08-09 |
| 7935942 | Technique for low-temperature ion implantation | Jonathan Gerald England, Steven R. Walther, Julian G. Blake, Paul J. Murphy, Reuel B. Liebert | 2011-05-03 |
| 7655933 | Techniques for temperature-controlled ion implantation | Jonathan Gerald England, Scott C. Holden | 2010-02-02 |
| 7595972 | Clamp for use in processing semiconductor workpieces | Paul J. Murphy, David E. Suuronen | 2009-09-29 |
| 7528392 | Techniques for low-temperature ion implantation | Jonathan Gerald England, D. Jeffrey Lischer | 2009-05-05 |
| 6863736 | Shaft cooling mechanisms | William Leavitt, Steven Richards | 2005-03-08 |
| 6299404 | Substrate transport apparatus with double substrate holders | James C. Davis, Christopher Hofmeister | 2001-10-09 |
| 6261048 | Multi-level substrate processing apparatus | — | 2001-07-17 |
| 6193506 | Apparatus and method for batch thermal conditioning of substrates | — | 2001-02-27 |
| 6158941 | Substrate transport apparatus with double substrate holders | James C. Davis, Christopher Hofmeister | 2000-12-12 |
| 6079927 | Automated wafer buffer for use with wafer processing equipment | — | 2000-06-27 |
| 6062798 | Multi-level substrate processing apparatus | — | 2000-05-16 |
| 5854468 | Substrate heating apparatus with cantilevered lifting arm | — | 1998-12-29 |
| 5778968 | Method for heating or cooling wafers | Ruth Ann Hendrickson, Christopher Hofmeister | 1998-07-14 |
| 5752796 | Vacuum integrated SMIF system | — | 1998-05-19 |
| 5664925 | Batchloader for load lock | Michael W. Pippins, Mitchell Drew | 1997-09-09 |
| 5613821 | Cluster tool batchloader of substrate carrier | Michael W. Pippins, Mitchell Drew | 1997-03-25 |
| 5609459 | Door drive mechanisms for substrate carrier and load lock | — | 1997-03-11 |
| 5607276 | Batchloader for substrate carrier on load lock | Michael W. Pippins, Mitchell Drew | 1997-03-04 |
| 5588789 | Load arm for load lock | Christopher Hofmeister | 1996-12-31 |
| 5588827 | Passive gas substrate thermal conditioning apparatus and method | — | 1996-12-31 |