Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551904 | System and technique for profile modulation using high tilt angles | Venkataramana R. Chavva, Kyuha Shim, Hans-Joachim L. Gossmann, Scott Falk, Rajesh Prasad | 2023-01-10 |
| 10515802 | Techniques for forming low stress mask using implantation | Rajesh Prasad, Tzu-Yu Liu, Deven Raj Mittal, Somchintana Norasetthekul, Kyuha Shim +5 more | 2019-12-24 |
| 8450193 | Techniques for temperature-controlled ion implantation | Jonathan Gerald England, Richard S. Muka, Ziwei Fang, Vikram Singh | 2013-05-28 |
| 7927986 | Ion implantation with heavy halogenide compounds | Ludovic Godet, George D. Papasouliotis | 2011-04-19 |
| 7642150 | Techniques for forming shallow junctions | Christopher R. Hatem, Anthony Renau, Jonathan Gerald England | 2010-01-05 |
| 7026229 | Athermal annealing with rapid thermal annealing system and method | Daniel F. Downey | 2006-04-11 |