Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7163901 | Methods for forming thin film layers by simultaneous doping and sintering | — | 2007-01-16 |
| 7135423 | Methods for forming low resistivity, ultrashallow junctions with low damage | — | 2006-11-14 |
| 7026229 | Athermal annealing with rapid thermal annealing system and method | Edwin Arevalo | 2006-04-11 |
| 6878415 | Methods for chemical formation of thin film layers using short-time thermal processes | — | 2005-04-12 |
| 6087247 | Method for forming shallow junctions in semiconductor wafers using controlled, low level oxygen ambients during annealing | — | 2000-07-11 |
| 6069062 | Methods for forming shallow junctions in semiconductor wafers | — | 2000-05-30 |
| 4474831 | Method for reflow of phosphosilicate glass | — | 1984-10-02 |
| 4358338 | End point detection method for physical etching process | George T. Lecouras | 1982-11-09 |