Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347687 | Etch rate modulation of FinFET through high-temperature ion implantation | Qintao Zhang, Jun Lu | 2025-07-01 |
| 12142475 | Sequential plasma and thermal treatment | Ning Li, Shuaidi Zhang, Mihaela Balseanu, Qi Gao, Tomohiko Kitajima +3 more | 2024-11-12 |
| 12112949 | Highly etch selective amorphous carbon film | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2024-10-08 |
| 12014927 | Highly etch selective amorphous carbon film | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2024-06-18 |
| 11756796 | Techniques for improved low dielectric constant film processing | Martin Jay Seamons, Shan Tang, Qi Gao, Deven Raj Mittal, Kyuha Shim | 2023-09-12 |
| 11626284 | Method of forming a 2-dimensional channel material, using ion implantation | Keith Tatseun Wong, Hurshvardhan Srivastava, Srinivas D. Nemani, Johannes M. van Meer | 2023-04-11 |
| 11551904 | System and technique for profile modulation using high tilt angles | Venkataramana R. Chavva, Kyuha Shim, Hans-Joachim L. Gossmann, Edwin Arevalo, Scott Falk | 2023-01-10 |
| 11469107 | Highly etch selective amorphous carbon film | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2022-10-11 |
| 11114299 | Techniques for reducing tip to tip shorting and critical dimension variation during nanoscale patterning | Qintao Zhang, Kyu-Ha Shim | 2021-09-07 |
| 10811257 | Techniques for forming low stress etch-resistant mask using implantation | Tzu-Yu Liu, Kyu-Ha Shim, Tom Ho Wing Yu, Zhong Qiang Hua, Adolph Miller Allen +3 more | 2020-10-20 |
| 10804156 | Techniques for forming dual epitaxial source/drain semiconductor device | Min Gyu Sung | 2020-10-13 |
| 10727059 | Highly etch selective amorphous carbon film | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +2 more | 2020-07-28 |
| 10629437 | Techniques and structure for forming dynamic random-access device using angled ions | Sony Varghese, John Hautala, Steven R. Sherman, Min Gyu Sung | 2020-04-21 |
| 10515802 | Techniques for forming low stress mask using implantation | Tzu-Yu Liu, Edwin Arevalo, Deven Raj Mittal, Somchintana Norasetthekul, Kyuha Shim +5 more | 2019-12-24 |
| 10403738 | Techniques for improved spacer in nanosheet device | Min Gyu Sung, John Hautala, Sony Varghese | 2019-09-03 |
| 10354875 | Techniques for improved removal of sacrificial mask | Ning Zhan, Tzu-Yu Liu, James Cournoyer, Kyu-Ha Shim, Kwangduk Douglas Lee +4 more | 2019-07-16 |
| 10332748 | Etch rate modulation through ion implantation | Steven R. Sherman, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more | 2019-06-25 |
| 9934982 | Etch rate modulation through ion implantation | Steven R. Sherman, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more | 2018-04-03 |
| 9018064 | Method of doping a polycrystalline transistor channel for vertical NAND devices | Andrew Waite, Jonathan Gerald England | 2015-04-28 |
| D453470 | Adjustable door barricade | — | 2002-02-12 |