Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142475 | Sequential plasma and thermal treatment | Ning Li, Mihaela Balseanu, Qi Gao, Rajesh Prasad, Tomohiko Kitajima +3 more | 2024-11-12 |
| 11970777 | Deposition of low-k films | Ning Li, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Mark Saly, Thomas Knisley | 2024-04-30 |
| 11713507 | Low-k films | Ning Li, Mihaela Balseanu | 2023-08-01 |
| 11447865 | Deposition of low-κ films | Ning Li, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Mark Saly, Thomas Knisley | 2022-09-20 |
| 11371144 | Low-k films | Ning Li, Mihaela Balseanu | 2022-06-28 |
| 11359281 | Selective deposition of SiCON by plasma ALD | Ning Li, Mihaela Balseanu | 2022-06-14 |