Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278124 | Model-based controlled load lock pumping scheme | D. Jeffrey Lischer, Bon-Woong Koo, Dawei Sun, Chi-Yang Cheng, Paul J. Murphy +4 more | 2025-04-15 |
| 10332748 | Etch rate modulation through ion implantation | Rajesh Prasad, Steven R. Sherman, Andrew Waite, Sungho Jo, Kyu-Ha Shim +1 more | 2019-06-25 |
| 9934982 | Etch rate modulation through ion implantation | Rajesh Prasad, Steven R. Sherman, Andrew Waite, Sungho Jo, Kyu-Ha Shim +1 more | 2018-04-03 |