Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278124 | Model-based controlled load lock pumping scheme | D. Jeffrey Lischer, Bon-Woong Koo, Dawei Sun, Paul J. Murphy, Frank Sinclair +4 more | 2025-04-15 |
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone +2 more | 2022-10-18 |