| 12278124 |
Model-based controlled load lock pumping scheme |
D. Jeffrey Lischer, Dawei Sun, Chi-Yang Cheng, Paul J. Murphy, Frank Sinclair +4 more |
2025-04-15 |
| 12154755 |
Toroidal motion enhanced ion source |
June Young Kim, Jin Young Choi, Yong-Seok Hwang, Kyoung-Jae Chung |
2024-11-26 |
| D1051838 |
Single-slot tubular cathode |
Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel, Graham Wright +6 more |
2024-11-19 |
| 11810746 |
Variable thickness ion source extraction plate |
Alexandre Likhanskii, Alexander S. Perel, Jay T. Scheuer, Robert C. Lindberg, Peter F. Kurunczi +1 more |
2023-11-07 |
| 11631567 |
Ion source with single-slot tubular cathode |
Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel, Graham Wright +6 more |
2023-04-18 |
| 11600473 |
Ion source with biased extraction plate |
Svetlana B. Radovanov, Alexandre Likhanskii |
2023-03-07 |
| 11562885 |
Particle yield via beam-line pressure control |
Thomas Stacy, Jay T. Scheuer, Eric D. Hermanson, Tseh-Jen Hsieh |
2023-01-24 |
| 11450504 |
GeH4/Ar plasma chemistry for ion implant productivity enhancement |
Ajdin Sarajlic, Ronald F. Johnson, Nunzio V. Carbone, Peter Ewing, Mervyn Deegan |
2022-09-20 |
| 11424097 |
Ion source with tubular cathode |
Svetlana B. Radovanov, Frank Sinclair, You Chia Li, Peter Ewing, Ajdin Sarajlic +2 more |
2022-08-23 |
| 11127557 |
Ion source with single-slot tubular cathode |
Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel, Graham Wright +6 more |
2021-09-21 |
| 11114277 |
Dual cathode ion source |
Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more |
2021-09-07 |
| 11049691 |
Ion beam quality control using a movable mass resolving device |
Robert C. Lindberg, Eric D. Hermanson, Frank Sinclair, Antonella Cucchetti, Randy Martin +3 more |
2021-06-29 |
| 10923306 |
Ion source with biased extraction plate |
Svetlana B. Radovanov, Alexandre Likhanskii |
2021-02-16 |
| 10923309 |
GeH4/Ar plasma chemistry for ion implant productivity enhancement |
Ajdin Sarajlic, Ronald F. Johnson, Nunzio V. Carbone, Peter Ewing, Mervyn Deegan |
2021-02-16 |
| 10825653 |
Method of improving ion beam quality in an implant system |
John W. Graff, John A. Frontiero, Nicholas PT Bateman, Timothy J. Miller, Vikram M. Bholse |
2020-11-03 |
| 10804075 |
Method of improving ion beam quality in an implant system |
John W. Graff, John A. Frontiero, Nicholas PT Bateman, Timothy J. Miller, Vikram M. Bhosle |
2020-10-13 |
| 10748738 |
Ion source with tubular cathode |
Svetlana B. Radovanov, Frank Sinclair, You Chia Li, Peter Ewing, Ajdin Sarajlic +2 more |
2020-08-18 |
| 10741361 |
Dual cathode ion source |
Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more |
2020-08-11 |
| 10446372 |
Dual cathode ion source |
Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more |
2019-10-15 |
| 10446371 |
Boron implanting using a co-gas |
Vikram M. Bhosle, John A. Frontiero |
2019-10-15 |
| 10290466 |
Boron implanting using a co-gas |
Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller, Svetlana B. Radovanov +3 more |
2019-05-14 |
| 10290462 |
High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture |
Alexandre Likhanskii, Svetlana B. Radovanov, Anthony Renau |
2019-05-14 |
| 10290475 |
Biasing system for a plasma processing apparatus |
Richard M. White |
2019-05-14 |
| 10262833 |
Temperature controlled ion source |
Scott C. Holden, Brant S. Binns, Richard M. White, Kenneth L. Starks, Eric R. Cobb |
2019-04-16 |
| 10134568 |
RF ion source with dynamic volume control |
Yong-Seok Hwang, Kyong-Jae Chung |
2018-11-20 |