Issued Patents All Time
Showing 26–50 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978554 | Dual cathode ion source | Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more | 2018-05-22 |
| 9922795 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Alexandre Likhanskii, Svetlana B. Radovanov, Anthony Renau | 2018-03-20 |
| 9899193 | RF ion source with dynamic volume control | Yong-Seok Hwang, Kyong-Jae Chung | 2018-02-20 |
| 9887067 | Boron implanting using a co-gas | Vikram M. Bhosle, John A. Frontiero | 2018-02-06 |
| 9865430 | Boron implanting using a co-gas | Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller, Svetlana B. Radovanov +3 more | 2018-01-09 |
| 9859098 | Temperature controlled ion source | Scott C. Holden, Brant S. Binns, Richard M. White, Kenneth L. Starks, Eric R. Cobb | 2018-01-02 |
| 9840772 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Christopher J. Leavitt, John A. Frontiero, Timothy J. Miller, Svetlana B. Radovanov | 2017-12-12 |
| 9711505 | Semiconductor devices having dummy gate structure for controlling channel stress | Byoung-Hak Hong, Sung Il Park, Kyu Baik Chang, Keun Hwi Cho, Dae Won Ha | 2017-07-18 |
| 9677171 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Christopher J. Leavitt, John A. Frontiero, Timothy J. Miller, Svetlana B. Radovanov | 2017-06-13 |
| 9524849 | Method of improving ion beam quality in an implant system | John W. Graff, John A. Frontiero, Nicholas PT Bateman, Timothy J. Miller, Vikram M. Bhosle | 2016-12-20 |
| 9520259 | Ion beam uniformity control | Alexandre Likhanskii, Svetlana B. Radovanov | 2016-12-13 |
| 9478679 | Dielectric coating of the edge of a solar cell | Nicholas P. T. Bateman, Vikram M. Bhosle | 2016-10-25 |
| 9441290 | System and method of improving implant quality in a plasma-based implant system | Min Sung JEON, Yong Tae Kim, Timothy J. Miller | 2016-09-13 |
| 9297063 | Plasma potential modulated ion implantation system | Svetlana B. Radovanov, Victor M. Benveniste, Richard M. White, Kevin M. Daniels | 2016-03-29 |
| 9288889 | Apparatus and techniques for energetic neutral beam processing | Svetlana B. Radovanov, Peter F. Kurunczi, Ludovic Godet | 2016-03-15 |
| 9230773 | Ion beam uniformity control | Alexandre Likhanskii, Svetlana B. Radovanov | 2016-01-05 |
| 9232628 | Method and system for plasma-assisted ion beam processing | Svetlana B. Radovanov, Ludovic Godet | 2016-01-05 |
| 9196489 | Ion implantation based emitter profile engineering via process modifications | Vikram M. Bhosle | 2015-11-24 |
| 9142379 | Ion source and a method for in-situ cleaning thereof | Christopher Campbell, Craig R. Chaney, Robert C. Lindberg, Wilhelm P. Platow, Alexander S. Perel | 2015-09-22 |
| 9093372 | Technique for processing a substrate | Richard M. White, Svetlana B. Radovanov, Kevin M. Daniels, Eric R. Cobb, David W. Pitman | 2015-07-28 |
| 9064795 | Technique for processing a substrate | Richard M. White, Svetlana B. Radovanov, Kevin M. Daniels, Eric R. Cobb, David W. Pitman | 2015-06-23 |
| 9062377 | Reducing glitching in an ion implanter | William T. Levay, George M. Gammel, Brant S. Binns, Richard M. White | 2015-06-23 |
| 9034743 | Method for implant productivity enhancement | Peter F. Kurunczi, John A. Frontiero, William T. Levay, Christopher J. Leavitt, Timothy J. Miller +3 more | 2015-05-19 |
| 9018829 | Excited gas injection for ion implant control | Victor M. Benveniste, Christopher A. Rowland, Craig R. Chaney, Frank Sinclair, Neil J. Bassom | 2015-04-28 |
| 8916056 | Biasing system for a plasma processing apparatus | Richard M. White | 2014-12-23 |