Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400824 | Ion extraction optics having novel blocker configuration | Costel Biloiu, Adam Calkins, Tyler Rockwell, Christopher Campbell | 2025-08-26 |
| 12106943 | Substrate halo arrangement for improved process uniformity | Jay Wallace, Simon Ruffell, Kevin Anglin, Tyler Rockwell, Christopher Campbell +2 more | 2024-10-01 |
| 11948781 | Apparatus and system including high angle extraction optics | Christopher Campbell, Costel Biloiu, Peter F. Kurunczi, Jay Wallace, Kevin T. Ryan +3 more | 2024-04-02 |
| 11495430 | Tunable extraction assembly for wide angle ion beam | Jay Wallace, Costel Biloiu | 2022-11-08 |
| 11361935 | Apparatus and system including high angle extraction optics | Costel Biloiu, Jay Wallace, Frank Sinclair, Christopher Campbell | 2022-06-14 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Tyler Rockwell, Christopher Campbell, Vikram Singh +3 more | 2019-03-05 |
| 10062548 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Richard J. Hertel, Glen Gilchrist | 2018-08-28 |
| 9863032 | Techniques for processing a substrate | Russell J. Low, Nicholas P. T. Bateman, Benjamin B. Riordon | 2018-01-09 |
| 9297063 | Plasma potential modulated ion implantation system | Svetlana B. Radovanov, Victor M. Benveniste, Bon-Woong Koo, Richard M. White | 2016-03-29 |
| 9287085 | Processing apparatus and method of treating a substrate | Ernest E. Allen, Jon Ballou, James P. Buonodono, Joseph P. Dzengeleski | 2016-03-15 |
| 9093372 | Technique for processing a substrate | Bon-Woong Koo, Richard M. White, Svetlana B. Radovanov, Eric R. Cobb, David W. Pitman | 2015-07-28 |
| 9076914 | Techniques for processing a substrate | Russell L. Low, Benjamin B. Riordon | 2015-07-07 |
| 9064795 | Technique for processing a substrate | Bon-Woong Koo, Richard M. White, Svetlana B. Radovanov, Eric R. Cobb, David W. Pitman | 2015-06-23 |
| 9006688 | Techniques for processing a substrate using a mask | Russell J. Low, Benjamin B. Riordon | 2015-04-14 |
| 9000446 | Techniques for processing a substrate | Benjamin B. Riordon, William T. Weaver, Steven M. Anella | 2015-04-07 |
| 8937004 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh +4 more | 2015-01-20 |
| 8900982 | Techniques for processing a substrate | Russell L. Low, Nicholas P. T. Bateman, Benjamin B. Riordon | 2014-12-02 |
| 8756021 | Method and system for in-situ monitoring of cathode erosion and predicting cathode lifetime | Russell J. Low, Bon-Woong Koo, Richard M. White, James W. Blanchette | 2014-06-17 |
| 8481960 | Deceleration lens | Svetlana B. Radovanov, Jason M. Schaller, Richard M. White, Kevin Verrier, James W. Blanchette +2 more | 2013-07-09 |
| 8461558 | System and method for ion implantation with dual purpose mask | Bon-Woong Koo, Richard M. White | 2013-06-11 |
| 8461030 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh +4 more | 2013-06-11 |
| 8216923 | Integrated shadow mask/carrier for patterned ion implantation | Nicholas P. T. Bateman, Atul Gupta, Russell J. Low, Benjamin B. Riordon, Robert J. Mitchell +1 more | 2012-07-10 |
| 7816239 | Technique for manufacturing a solar cell | Julian G. Blake | 2010-10-19 |
| 7675048 | Wafer holding robot end effecter vertical position determination in ion implanter system | Brant S. Binns, Robert A. Poltras | 2010-03-09 |
| 7236853 | Automated robot alignment system and method using kinematic pins and end effector sensor | Stanley W. Stone | 2007-06-26 |