RL

Russell J. Low

VA Varian Semiconductor Equipment Associates: 42 patents #8 of 513Top 2%
📍 Newark, DE: #17 of 1,550 inventorsTop 2%
🗺 Delaware: #124 of 7,163 inventorsTop 2%
Overall (All Time): #73,592 of 4,157,543Top 2%
42
Patents All Time

Issued Patents All Time

Showing 1–25 of 42 patents

Patent #TitleCo-InventorsDate
9863032 Techniques for processing a substrate Kevin M. Daniels, Nicholas P. T. Bateman, Benjamin B. Riordon 2018-01-09
9006688 Techniques for processing a substrate using a mask Kevin M. Daniels, Benjamin B. Riordon 2015-04-14
8937004 Apparatus and method for controllably implanting workpieces Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh +4 more 2015-01-20
8768040 Substrate identification and tracking through surface reflectance Benjamin B. Riordon 2014-07-01
8756021 Method and system for in-situ monitoring of cathode erosion and predicting cathode lifetime Kevin M. Daniels, Bon-Woong Koo, Richard M. White, James W. Blanchette 2014-06-17
8685846 Technique for processing a substrate William T. Weaver, Nicholas P. T. Bateman, Atul Gupta 2014-04-01
8598547 Handling beam glitches during ion implantation of workpieces Atul Gupta, William T. Weaver 2013-12-03
8461556 Using beam blockers to perform a patterned implant of a workpiece Daniel Distaso 2013-06-11
8461030 Apparatus and method for controllably implanting workpieces Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh +4 more 2013-06-11
8455760 Interfacing two insulation parts in high voltage environment Kasegn D. Tekletsadik, Anthony Renau, Piotr Lubicki, D. Jeffrey Lischer, Steve Krause +2 more 2013-06-04
8455847 Mask health monitor using a faraday probe Benjamin B. Riordon, Nicholas P. T. Bateman, William T. Weaver 2013-06-04
8330127 Flexible ion source Jay T. Scheuer, Alexander S. Perel, Craig R. Chaney, Neil J. Bassom 2012-12-11
8216923 Integrated shadow mask/carrier for patterned ion implantation Nicholas P. T. Bateman, Kevin M. Daniels, Atul Gupta, Benjamin B. Riordon, Robert J. Mitchell +1 more 2012-07-10
8164068 Mask health monitor using a faraday probe Benjamin B. Riordon, Nicholas P. T. Bateman, William T. Weaver 2012-04-24
8153466 Mask applied to a workpiece Julian G. Blake, Frank Sinclair 2012-04-10
8143604 Insulator system for a terminal structure of an ion implantation system Piortr R. Lubicki, D. Jeffrey Lischer, Steve Krause, Eric D. Hermanson, Joseph C. Olson 2012-03-27
8084293 Continuously optimized solar cell metallization design through feed-forward process Benjamin B. Riordon, Atul Gupta, William T. Weaver 2011-12-27
7999239 Techniques for reducing an electrical stress in an acceleration/deceleraion system Kasegn D. Tekletsadik 2011-08-16
8000080 Particle trap Stephen E. Krause, Kasegn D. Tekletsadik 2011-08-16
7887034 Indirectly heated cathode clamp system and method Stephen E. Krause, Eric R. Cobb 2011-02-15
7863520 Interfacing two insulation parts in high voltage environment Kasegn D. Tekletsadik, Anthony Renau, Piotr Lubicki, D. Jeffrey Lischer, Steve Krause +2 more 2011-01-04
7863531 Techniques for making high voltage connections Douglas E. May, Kasegn D. Tekletsadik, Eric D. Hermanson, Piotr Lubicki, Joseph C. Olson +1 more 2011-01-04
7842934 Terminal structures of an ion implanter having insulated conductors with dielectric fins Kasegn D. Tekletsadik, Eric D. Hermanson, Doug E. May, Steve Krause 2010-11-30
7820986 Techniques for controlling a charged particle beam Piotr Lubicki, Joseph C. Olson, Anthony Renau 2010-10-26
7821213 Techniques for controlling a charged particle beam Piotr Lubicki, Stephen E. Krause, Frank Sinclair 2010-10-26