Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799999 | Insulated conducting device with multiple insulation segments | Kasegn D. Tekletsadik, Steve Krause, Eric D. Hermanson | 2010-09-21 |
| 7675046 | Terminal structure of an ion implanter | Kasegn D. Tekletsadik | 2010-03-09 |
| 7586110 | Techniques for detecting ion beam contamination in an ion implantation system and interlocking same | — | 2009-09-08 |
| 7576337 | Power supply for an ion implantation system | Piotr Lubicki, Steve Krause, Eric D. Hermanson | 2009-08-18 |
| 7544958 | Contamination reduction during ion implantation | — | 2009-06-09 |
| 7528391 | Techniques for reducing contamination during ion implantation | — | 2009-05-05 |
| 7491947 | Technique for improving performance and extending lifetime of indirectly heated cathode ion source | Eric R. Cobb, Craig R. Chaney, Leo V. Klos | 2009-02-17 |
| 7482598 | Techniques for preventing parasitic beamlets from affecting ion implantation | Jonathan Gerald England, Stephen E. Krause, Eric D. Hermanson | 2009-01-27 |
| 7476878 | Techniques for reducing effects of photoresist outgassing | Jonathan Gerald England, Stephen E. Krause, Eric D. Hermanson | 2009-01-13 |
| 7476877 | Wafer charge monitoring | George M. Gammel, Peter F. Kurunczi, Eric R. Cobb | 2009-01-13 |
| 7459704 | Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms | Joseph C. Olson, Anthony Renau, Donna L. Smatlak, Kurt Deckerlucke, Paul J. Murphy +2 more | 2008-12-02 |
| 7446326 | Technique for improving ion implanter productivity | Craig R. Chaney, Jonathan Gerald England | 2008-11-04 |
| 7402820 | Ion beam contamination determination | Joseph C. Olson, Antonella Cucchetti, Anthony Renau, Marie Welsch | 2008-07-22 |
| 7361913 | Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control | Joseph C. Olson, David Roger Timberlake, James McLane, Mark D. Saunders, James J. Cummings +2 more | 2008-04-22 |
| 7102139 | Source arc chamber for ion implanter having repeller electrode mounted to external insulator | Eric R. Cobb, Joseph C. Olson, Leo V. Klos | 2006-09-05 |
| 7005657 | Wafer-scanning ion implanter having fast beam deflection apparatus for beam glitch recovery | Gordon C. Angel | 2006-02-28 |
| 6984831 | Gas flow restricting cathode system for ion implanter and related method | Joseph C. Olson, Curt D. Bergeron, Eric R. Cobb, Jeffrey A. Burgess | 2006-01-10 |