Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404254 | Insertable target holder for solid dopant materials | Shreyansh Patel, Graham Wright, Daniel Alvarado, Klaus Becker, Daniel R. Tieger | 2022-08-02 |
| 8000080 | Particle trap | Russell J. Low, Kasegn D. Tekletsadik | 2011-08-16 |
| 7887034 | Indirectly heated cathode clamp system and method | Eric R. Cobb, Russell J. Low | 2011-02-15 |
| 7863531 | Techniques for making high voltage connections | Douglas E. May, Kasegn D. Tekletsadik, Eric D. Hermanson, Piotr Lubicki, Russell J. Low +1 more | 2011-01-04 |
| 7821213 | Techniques for controlling a charged particle beam | Piotr Lubicki, Russell J. Low, Frank Sinclair | 2010-10-26 |
| 7482598 | Techniques for preventing parasitic beamlets from affecting ion implantation | Russell J. Low, Jonathan Gerald England, Eric D. Hermanson | 2009-01-27 |
| 7476878 | Techniques for reducing effects of photoresist outgassing | Russell J. Low, Jonathan Gerald England, Eric D. Hermanson | 2009-01-13 |