Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262833 | Temperature controlled ion source | Scott C. Holden, Bon-Woong Koo, Brant S. Binns, Richard M. White, Kenneth L. Starks | 2019-04-16 |
| 9859098 | Temperature controlled ion source | Scott C. Holden, Bon-Woong Koo, Brant S. Binns, Richard M. White, Kenneth L. Starks | 2018-01-02 |
| 9093372 | Technique for processing a substrate | Bon-Woong Koo, Richard M. White, Svetlana B. Radovanov, Kevin M. Daniels, David W. Pitman | 2015-07-28 |
| 9064795 | Technique for processing a substrate | Bon-Woong Koo, Richard M. White, Svetlana B. Radovanov, Kevin M. Daniels, David W. Pitman | 2015-06-23 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair +7 more | 2013-06-18 |
| 8263944 | Directional gas injection for an ion source cathode assembly | John Bon-Woong Koo, David J. Twiss, Chris Campbell, Frank Sinclair, Alexander S. Perel +2 more | 2012-09-11 |
| 7887034 | Indirectly heated cathode clamp system and method | Stephen E. Krause, Russell J. Low | 2011-02-15 |
| 7888662 | Ion source cleaning method and apparatus | Costel Biloiu, Craig R. Chaney, Bon-Woong Koo, Wilhelm P. Platow | 2011-02-15 |
| 7655932 | Techniques for providing ion source feed materials | Christopher R. Hatem, Craig R. Chaney, Joseph C. Olson, Chris Campbell | 2010-02-02 |
| 7491947 | Technique for improving performance and extending lifetime of indirectly heated cathode ion source | Russell J. Low, Craig R. Chaney, Leo V. Klos | 2009-02-17 |
| 7476877 | Wafer charge monitoring | Russell J. Low, George M. Gammel, Peter F. Kurunczi | 2009-01-13 |
| 7102139 | Source arc chamber for ion implanter having repeller electrode mounted to external insulator | Russell J. Low, Joseph C. Olson, Leo V. Klos | 2006-09-05 |
| 6984831 | Gas flow restricting cathode system for ion implanter and related method | Russell J. Low, Joseph C. Olson, Curt D. Bergeron, Jeffrey A. Burgess | 2006-01-10 |