Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557496 | Load lock with integrated features | Michael Blanchard, Steven M. Anella, Jordan B. Tye, D. Jeffrey Lischer | 2023-01-17 |
| 10410844 | RF clean system for electrostatic elements | Kevin Anglin, Peter F. Kurunczi, Jay T. Scheuer, Eric D. Hermanson, Alexandre Likhanskii | 2019-09-10 |
| 10262833 | Temperature controlled ion source | Scott C. Holden, Bon-Woong Koo, Richard M. White, Kenneth L. Starks, Eric R. Cobb | 2019-04-16 |
| 9859098 | Temperature controlled ion source | Scott C. Holden, Bon-Woong Koo, Richard M. White, Kenneth L. Starks, Eric R. Cobb | 2018-01-02 |
| 9062377 | Reducing glitching in an ion implanter | William T. Levay, George M. Gammel, Bon-Woong Koo, Richard M. White | 2015-06-23 |
| 7675048 | Wafer holding robot end effecter vertical position determination in ion implanter system | Kevin M. Daniels, Robert A. Poltras | 2010-03-09 |