Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191113 | Systems and methods for optimizing full horizontal scanned beam distance | Tyler Wills, George M. Gammel, Eric D. Wilson, Xiangdong He, Shardul S. Patel +1 more | 2025-01-07 |
| 12154753 | Device to control uniformity of extracted ion beam | Graham Wright, Peter F. Kurunczi, Alexandre Likhanskii | 2024-11-26 |
| D1051838 | Single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more | 2024-11-19 |
| 11810746 | Variable thickness ion source extraction plate | Alexandre Likhanskii, Alexander S. Perel, Bon-Woong Koo, Robert C. Lindberg, Peter F. Kurunczi +1 more | 2023-11-07 |
| 11651932 | Mismatched optics for angular control of extracted ion beam | Alexandre Likhanskii, Sudhakar Mahalingam, Nevin H. Clay | 2023-05-16 |
| 11631567 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more | 2023-04-18 |
| 11562885 | Particle yield via beam-line pressure control | Thomas Stacy, Eric D. Hermanson, Bon-Woong Koo, Tseh-Jen Hsieh | 2023-01-24 |
| 11495434 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Alexandre Likhanskii +1 more | 2022-11-08 |
| 11437215 | Electrostatic filter providing reduced particle generation | Alexandre Likhanskii, Antonella Cucchetti, Eric D. Hermanson, Frank Sinclair, Robert C. Lindberg | 2022-09-06 |
| 11127557 | Ion source with single-slot tubular cathode | Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more | 2021-09-21 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Alexandre Likhanskii +1 more | 2021-06-15 |
| 10818469 | Cylindrical shaped arc chamber for indirectly heated cathode ion source | Alexander S. Perel, Graham Wright | 2020-10-27 |
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Alexandre Likhanskii +1 more | 2019-12-31 |
| 10410844 | RF clean system for electrostatic elements | Kevin Anglin, Brant S. Binns, Peter F. Kurunczi, Eric D. Hermanson, Alexandre Likhanskii | 2019-09-10 |
| 9805931 | Liquid immersion doping | Frank Sinclair, William Davis Lee, Peter L. Kellerman | 2017-10-31 |
| 9761410 | Apparatus and method for in-situ cleaning in ion beam apparatus | Alexandre Likhanskii, William Davis Lee | 2017-09-12 |
| 9685298 | Apparatus and method for contamination control in ion beam apparatus | Alexandre Likhanskii, William Davis Lee | 2017-06-20 |
| 9187832 | Extended lifetime ion source | Costel Biloiu, David Sporleder, Neil J. Bassom | 2015-11-17 |
| 8590485 | Small form factor plasma source for high density wide ribbon ion beam generation | Costel Biloiu, Joseph C. Olson, Frank Sinclair, Daniel Distaso | 2013-11-26 |
| 8330127 | Flexible ion source | Russell J. Low, Alexander S. Perel, Craig R. Chaney, Neil J. Bassom | 2012-12-11 |
| 8142607 | High density helicon plasma source for wide ribbon ion beam generation | Costel Biloiu, Alexander S. Perel | 2012-03-27 |
| 7999479 | Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control | Costel Biloiu, Alexander S. Perel | 2011-08-16 |
| 7878145 | Monitoring plasma ion implantation systems for fault detection and process control | Ziwei Fang, Sung-Cheon Ko, Edmund J. Winder, Daniel Distaso, Ludovic Godet +1 more | 2011-02-01 |
| 7622722 | Ion implantation device with a dual pumping mode and method thereof | Jonathan Gerald England, Christopher R. Hatem, Joseph C. Olson | 2009-11-24 |
| 7521691 | Magnetic monitoring of a Faraday cup for an ion implanter | Joseph P. Dzengeleski, Morgan Evans, Ashwin Shetty, Kenneth Swenson | 2009-04-21 |