Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11825590 | Drift tube, apparatus and ion implanter having variable focus electrode in linear accelerator | Charles T. Carlson | 2023-11-21 |
| 11818830 | RF quadrupole particle accelerator | Frank Sinclair, Wai-Ming Tam, Costel Biloiu | 2023-11-14 |
| 11495434 | In-situ plasma cleaning of process chamber components | Kevin Anglin, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2022-11-08 |
| 11189460 | System, apparatus and method for variable length electrode in linear accelerator | Charles T. Carlson, Paul J. Murphy, Frank Sinclair | 2021-11-30 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2021-06-15 |
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2019-12-31 |
| 10324121 | Charge integration based electrostatic clamp health monitor | Edward K. McIntyre, Edward J. Ladny, Nathaniel Robinson | 2019-06-18 |
| 10081861 | Selective processing of a workpiece | Morgan Evans, Daniel Distaso, Stanislav S. Todorov, Mark R. Amato, Jillian Reno | 2018-09-25 |
| 9988711 | Apparatus and method for multilayer deposition | Alexandre Likhanskii, Svetlana B. Radovanov | 2018-06-05 |
| 9978556 | Parallelizing electrostatic acceleration/deceleration optical element | Frank Sinclair | 2018-05-22 |
| 9960060 | Platen assembly | — | 2018-05-01 |
| 9899188 | Selective processing of a workpiece using ion beam implantation and workpiece rotation | Mark R. Amato, Jillian Reno | 2018-02-20 |
| 9847240 | Constant mass flow multi-level coolant path electrostatic chuck | — | 2017-12-19 |
| 9824846 | Dual material repeller | Alexander S. Perel, David Sporleder | 2017-11-21 |
| 9805931 | Liquid immersion doping | Frank Sinclair, Jay T. Scheuer, Peter L. Kellerman | 2017-10-31 |
| 9761410 | Apparatus and method for in-situ cleaning in ion beam apparatus | Alexandre Likhanskii, Jay T. Scheuer | 2017-09-12 |
| 9721750 | Controlling contamination particle trajectory from a beam-line electrostatic element | Alexandre Likhanskii | 2017-08-01 |
| 9711324 | Inert atmospheric pressure pre-chill and post-heat | Steve Drummond | 2017-07-18 |
| 9685298 | Apparatus and method for contamination control in ion beam apparatus | Alexandre Likhanskii, Jay T. Scheuer | 2017-06-20 |
| 9633885 | Variable electrode pattern for versatile electrostatic clamp operation | — | 2017-04-25 |
| 9624574 | Platen with multiple shaped grounding structures | — | 2017-04-18 |
| 9583308 | Light bath for particle suppression | — | 2017-02-28 |
| 9558980 | Vapor compression refrigeration chuck for ion implanters | Ashwin M. Purohit, Marvin R. LaFontaine | 2017-01-31 |
| 9478399 | Multi-aperture extraction system for angled ion beam | Alexandre Likhanskii, Svetlana B. Radovanov | 2016-10-25 |
| 9435038 | Ion implant assisted metal etching | Thomas R. Omstead, Tristan Y. Ma | 2016-09-06 |