Issued Patents All Time
Showing 25 most recent of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431329 | Method of assembling drift tube assemblies in ion implantors | Aaron P. Webb, Krag R. Senior, Chris Czajka, Jason M. Schaller | 2025-09-30 |
| 12315748 | Workpiece handling architecture for high workpiece throughput | Jason M. Schaller, Michael Mason Carrell, William T. Weaver | 2025-05-27 |
| 12315747 | Workpiece handling architecture for high workpiece throughput | Jason M. Schaller, Michael Mason Carrell, William T. Weaver | 2025-05-27 |
| 12308206 | Three layer resonator coil for linear accelerator | William H. Park, Luke Bonecutter | 2025-05-20 |
| 12279359 | Linear accelerator assembly including flexible high-voltage connection | David Blahnik, Robert Brent Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior | 2025-04-15 |
| 12249522 | Processing chamber with annealing mini-environment | Michael Honan, David Blahnik, Robert Brent Vopat, Jeffrey Blahnik | 2025-03-11 |
| 12185451 | Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamber | Robert Brent Vopat | 2024-12-31 |
| 12170220 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2024-12-17 |
| 12144101 | Resonator, linear accelerator configuration and ion implantation system having rotating exciter | Costel Biloiu, David Blahnik, Wai-Ming Tam, Frank Sinclair | 2024-11-12 |
| 12074042 | High-density substrate processing systems and methods | Jason M. Schaller, Steve Hongkham, Tuan Nguyen, Swaminathan Srinivasan, Khokan Chandra Paul | 2024-08-27 |
| 11982359 | Isolation valve | Benjamin B. Riordon, Anantha K. Subramani | 2024-05-14 |
| 11985756 | Linear accelerator coil including multiple fluid channels | Robert Brent Vopat | 2024-05-14 |
| 11948817 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, David Blahnik | 2024-04-02 |
| 11895766 | Linear accelerator assembly including flexible high-voltage connection | David Blahnik, Robert Brent Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior | 2024-02-06 |
| 11856685 | Stiffened RF LINAC coil inductor with internal support structure | Aaron P. Webb, Paul J. Murphy, Frank Sinclair, David Blahnik | 2023-12-26 |
| 11825590 | Drift tube, apparatus and ion implanter having variable focus electrode in linear accelerator | William Davis Lee | 2023-11-21 |
| 11812539 | Resonator, linear accelerator configuration and ion implantation system having rotating exciter | Costel Biloiu, David Blahnik, Wai-Ming Tam, Frank Sinclair | 2023-11-07 |
| 11791176 | Processing chamber with annealing mini-environment | Michael Honan, David Blahnik, Robert Brent Vopat, Jeffrey Blahnik | 2023-10-17 |
| 11710617 | Resonator coil having an asymmetrical profile | Costel Biloiu, Michael Honan, Robert Brent Vopat, David Blahnik, Frank Sinclair +1 more | 2023-07-25 |
| 11665810 | Modular linear accelerator assembly | Frank Sinclair, Paul J. Murphy, Michael Honan | 2023-05-30 |
| 11596051 | Resonator, linear accelerator configuration and ion implantation system having toroidal resonator | Costel Biloiu, Frank Sinclair, Paul J. Murphy, David Blahnik | 2023-02-28 |
| 11590662 | Robot for simultaneous substrate transfer | Paul Z. Wirth, Jason M. Schaller | 2023-02-28 |
| 11574826 | High-density substrate processing systems and methods | Jason M. Schaller, Steve Hongkham, Tuan Nguyen, Swaminathan Srinivasan, Khokan Chandra Paul | 2023-02-07 |
| 11476135 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, David Blahnik | 2022-10-18 |
| 11443973 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-09-13 |