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Robot for simultaneous substrate transfer |
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| 11883958 |
Robot apparatus including dual end effectors with variable pitch and methods |
Karuppasamy Muthukamatchy, Eran Weiss, Jeffrey C. Hudgens, Chandrakant M. Sapkale |
2024-01-30 |
| 11850745 |
Multi-turn drive assembly and systems and methods of use thereof |
Jeff Hudgens, Damon K. Cox |
2023-12-26 |
| 11770049 |
Generating electric power for a robotic end effector |
Alexander Berger, Paul Lawrence Korff, William P. Laceky, Jeffrey C. Hudgens, Damon K. Cox +1 more |
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| 11547030 |
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools |
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| 11540432 |
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools |
Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, David Fenwick +6 more |
2022-12-27 |
| 11443973 |
Robot for simultaneous substrate transfer |
Jason M. Schaller, Luke Bonecutter, Charles T. Carlson, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more |
2022-09-13 |
| 11413744 |
Multi-turn drive assembly and systems and methods of use thereof |
Jeff Hudgens, Damon K. Cox |
2022-08-16 |
| 11358809 |
Vacuum robot apparatus for variable pitch access |
Jeffrey C. Hudgens, Karuppasamy Muthukamatchi |
2022-06-14 |
| 10968052 |
Long reach vacuum robot with dual wafer pockets |
Damon K. Cox |
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| 10710819 |
Long reach vacuum robot with dual wafer pockets |
Damon K. Cox |
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Sensor based auto-calibration wafer |
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2020-01-21 |