| 12492464 |
Protective metal oxy-fluoride coatings |
Chengtsin Lee, Jennifer Y. Sun, Yi-song Chen |
2025-12-09 |
|
| 12351910 |
Hafnium aluminum oxide coatings deposited by atomic layer deposition |
Jennifer Y. Sun, Cheng-Hsuan Chou, Xiao-Ming He |
2025-07-08 |
|
| 12104246 |
Atomic layer deposition of protective coatings for semiconductor process chamber components |
Jennifer Y. Sun |
2024-10-01 |
$68,865,000 |
| 12004337 |
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools |
Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more |
2024-06-04 |
$68,807,000 |
| 12002657 |
Multi-layer plasma resistant coating by atomic layer deposition |
Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan |
2024-06-04 |
$68,807,000 |
| 11667577 |
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments |
Jennifer Y. Sun |
2023-06-06 |
$40,761,000 |
| 11572617 |
Protective metal oxy-fluoride coatings |
Chengtsin Lee, Jennifer Y. Sun, Yikai Chen |
2023-02-07 |
$44,390,000 |
| 11547030 |
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools |
Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more |
2023-01-03 |
$39,123,000 |
| 11540432 |
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools |
Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more |
2022-12-27 |
$54,393,000 |
| 11326253 |
Atomic layer deposition of protective coatings for semiconductor process chamber components |
Jennifer Y. Sun |
2022-05-10 |
$45,778,000 |
| 11251023 |
Multi-layer plasma resistant coating by atomic layer deposition |
Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan |
2022-02-15 |
$65,265,000 |
| 11198937 |
Atomic layer deposition of protective coatings for semiconductor process chamber components |
Jennifer Y. Sun |
2021-12-14 |
$102,368,000 |
| 11198936 |
Atomic layer deposition of protective coatings for semiconductor process chamber components |
Jennifer Y. Sun |
2021-12-14 |
$102,368,000 |
| 11014853 |
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments |
Jennifer Y. Sun |
2021-05-25 |
$67,143,000 |
| 11008653 |
Multi-layer coating with diffusion barrier layer and erosion resistant layer |
Xiaowei Wu, Jennifer Y. Sun |
2021-05-18 |
$51,490,000 |
| 10573497 |
Multi-layer plasma resistant coating by atomic layer deposition |
Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan |
2020-02-25 |
$22,337,000 |
| 10563303 |
Metal oxy-flouride films based on oxidation of metal flourides |
Xiaowei Wu, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice |
2020-02-18 |
$26,722,000 |
| 10443125 |
Flourination process to create sacrificial oxy-flouride layer |
Xiaowei Wu, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice |
2019-10-15 |
$25,920,000 |
| 10186400 |
Multi-layer plasma resistant coating by atomic layer deposition |
Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan |
2019-01-22 |
$28,931,000 |
| 9142938 |
Apparatus and method of establishing optical communication channels between a steerable array of laser emitters and an array of optical detectors |
Terrel Morris, Richard John Luebs, Duane A. Wegher, Jeffry D. Yetter |
2015-09-22 |
$5,490,000 |
| 8059927 |
Optical connections and methods of forming optical connections |
Richard John Luebs, Terrel Morris, Duane A. Wegher, Jeffrey D. Yetter |
2011-11-15 |
$11,189,000 |
| 7874739 |
Optical connections and methods of forming optical connections |
Richard John Luebs, Terrel Morris, Duane A. Wegher, Jeffrey D. Yetter |
2011-01-25 |
$16,732,000 |
| 7813613 |
Optical connections and methods of forming optical connections |
Richard John Luebs, Terrel Morris, Duane A. Wegher, Jeffrey D. Yetter |
2010-10-12 |
$15,317,000 |
| 7809278 |
Apparatus and method of providing separate control and data channels between arrays of light emitters and detectors for optical communication and alignment |
Terrel Morris, Richard John Luebs, Duane A. Wegher, Jeffrey D. Yatter |
2010-10-05 |
$13,473,000 |
| 7693362 |
Optical connections and methods of forming optical connections |
Richard John Luebs, Terrel Morris, Duane A. Wegher, Jeffrey D. Yetter |
2010-04-06 |
$10,078,000 |
