Issued Patents All Time
Showing 25 most recent of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351910 | Hafnium aluminum oxide coatings deposited by atomic layer deposition | Jennifer Y. Sun, Cheng-Hsuan Chou, Xiao-Ming He | 2025-07-08 |
| 12104246 | Atomic layer deposition of protective coatings for semiconductor process chamber components | Jennifer Y. Sun | 2024-10-01 |
| 12004337 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more | 2024-06-04 |
| 12002657 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan | 2024-06-04 |
| 11667577 | Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments | Jennifer Y. Sun | 2023-06-06 |
| 11572617 | Protective metal oxy-fluoride coatings | Chengtsin Lee, Jennifer Y. Sun, Yikai Chen | 2023-02-07 |
| 11547030 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more | 2023-01-03 |
| 11540432 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more | 2022-12-27 |
| 11326253 | Atomic layer deposition of protective coatings for semiconductor process chamber components | Jennifer Y. Sun | 2022-05-10 |
| 11251023 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan | 2022-02-15 |
| 11198937 | Atomic layer deposition of protective coatings for semiconductor process chamber components | Jennifer Y. Sun | 2021-12-14 |
| 11198936 | Atomic layer deposition of protective coatings for semiconductor process chamber components | Jennifer Y. Sun | 2021-12-14 |
| 11014853 | Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments | Jennifer Y. Sun | 2021-05-25 |
| 11008653 | Multi-layer coating with diffusion barrier layer and erosion resistant layer | Xiaowei Wu, Jennifer Y. Sun | 2021-05-18 |
| 10573497 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan | 2020-02-25 |
| 10563303 | Metal oxy-flouride films based on oxidation of metal flourides | Xiaowei Wu, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice | 2020-02-18 |
| 10443125 | Flourination process to create sacrificial oxy-flouride layer | Xiaowei Wu, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice | 2019-10-15 |
| 10186400 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan | 2019-01-22 |
| 9142938 | Apparatus and method of establishing optical communication channels between a steerable array of laser emitters and an array of optical detectors | Terrel Morris, Richard John Luebs, Duane A. Wegher, Jeffry D. Yetter | 2015-09-22 |
| 8059927 | Optical connections and methods of forming optical connections | Richard John Luebs, Terrel Morris, Duane A. Wegher, Jeffrey D. Yetter | 2011-11-15 |
| 7874739 | Optical connections and methods of forming optical connections | Richard John Luebs, Terrel Morris, Duane A. Wegher, Jeffrey D. Yetter | 2011-01-25 |
| 7813613 | Optical connections and methods of forming optical connections | Richard John Luebs, Terrel Morris, Duane A. Wegher, Jeffrey D. Yetter | 2010-10-12 |
| 7809278 | Apparatus and method of providing separate control and data channels between arrays of light emitters and detectors for optical communication and alignment | Terrel Morris, Richard John Luebs, Duane A. Wegher, Jeffrey D. Yatter | 2010-10-05 |
| 7693362 | Optical connections and methods of forming optical connections | Richard John Luebs, Terrel Morris, Duane A. Wegher, Jeffrey D. Yetter | 2010-04-06 |
| 7653108 | Apparatus and method of establishing optical communication channels between a steerable array of laser emitters and an array of optical detectors | Terrel Morris, Richard John Luebs, Duane A. Wegher, Jeffry D. Yetter | 2010-01-26 |