| 12209307 |
Zone-controlled rare-earth oxide ALD and CVD coatings |
Jennifer Y. Sun, Michael R. Rice |
2025-01-28 |
|
| 12115771 |
Electronic devices with multilayer adhesive |
Hoon Kim, Yuxi Zhao, Terry C. Lam, Yasmin F. Afsar, Chang-Chia Huang +3 more |
2024-10-15 |
$249,534,000 |
| 12098107 |
Methods of making nanopowders, nanoceramic materials and nanoceramic components |
Guodong Zhan, Xiao-Ming He, Jennifer Y. Sun |
2024-09-24 |
$100,019,000 |
| 12049696 |
Plasma resistant process chamber lid |
Jennifer Y. Sun, Michael R. Rice |
2024-07-30 |
$79,851,000 |
| 12002657 |
Multi-layer plasma resistant coating by atomic layer deposition |
David Fenwick, Jennifer Y. Sun, Guodong Zhan |
2024-06-04 |
$68,807,000 |
| 11667575 |
Erosion resistant metal oxide coatings |
Jennifer Y. Sun, Michael R. Rice |
2023-06-06 |
$40,761,000 |
| 11667578 |
Methods of making nanopowders, nanoceramic materials and nanoceramic components |
Guodong Zhan, Xiao-Ming He, Jennifer Y. Sun |
2023-06-06 |
$40,761,000 |
| 11639547 |
Halogen resistant coatings and methods of making and using thereof |
Prerna Goradia, Jennifer Y. Sun, Geetika Bajaj, Atul Bhaskar Chaudhari, Ankur Kadam |
2023-05-02 |
$66,273,000 |
| 11562890 |
Corrosion resistant ground shield of processing chamber |
Dmitry Lubomirsky, Xiao-Ming He, Jennifer Y. Sun, Laksheswar Kalita, Soonam Park |
2023-01-24 |
$45,726,000 |
| 11279656 |
Nanopowders, nanoceramic materials and methods of making and use thereof |
Guodong Zhan, Xiao-Ming He, Jennifer Y. Sun |
2022-03-22 |
$64,102,000 |
| 11251023 |
Multi-layer plasma resistant coating by atomic layer deposition |
David Fenwick, Jennifer Y. Sun, Guodong Zhan |
2022-02-15 |
$65,265,000 |
| 11180847 |
Atomic layer deposition coatings for high temperature ceramic components |
Jennifer Y. Sun, Michael R. Rice |
2021-11-23 |
$124,354,000 |
| 11022333 |
Control for device in a predetermined space area |
Jianwei Zhao, Hon Ming Ng |
2021-06-01 |
|
| 11008653 |
Multi-layer coating with diffusion barrier layer and erosion resistant layer |
David Fenwick, Jennifer Y. Sun |
2021-05-18 |
$51,490,000 |
| D907016 |
Antenna mounting frame |
Ziming He, Xiangjie Bian |
2021-01-05 |
|
| 10755900 |
Multi-layer plasma erosion protection for chamber components |
Toan Q. Tran, Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiao-Ming He +2 more |
2020-08-25 |
$29,525,000 |
| 10573497 |
Multi-layer plasma resistant coating by atomic layer deposition |
David Fenwick, Jennifer Y. Sun, Guodong Zhan |
2020-02-25 |
$22,337,000 |
| 10563303 |
Metal oxy-flouride films based on oxidation of metal flourides |
David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice |
2020-02-18 |
$26,722,000 |
| 10443125 |
Flourination process to create sacrificial oxy-flouride layer |
David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice |
2019-10-15 |
$25,920,000 |
| 10443126 |
Zone-controlled rare-earth oxide ALD and CVD coatings |
Jennifer Y. Sun, Michael R. Rice |
2019-10-15 |
$25,920,000 |
| D853363 |
Antenna |
Bei Zheng, Xiangjie Bian |
2019-07-09 |
|
| D852785 |
Antenna |
Bei Zheng, Xiangjie Bian |
2019-07-02 |
|
| 10186400 |
Multi-layer plasma resistant coating by atomic layer deposition |
David Fenwick, Jennifer Y. Sun, Guodong Zhan |
2019-01-22 |
$28,931,000 |
| D828341 |
Antenna |
Wei-Jen Chang, Bei Zheng, Ziming He, Simon Yang |
2018-09-11 |
|
| D824372 |
Antenna |
Bei Zheng, Wei-Jen Chang, Simon Yang |
2018-07-31 |
|
