Issued Patents All Time
Showing 25 most recent of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209307 | Zone-controlled rare-earth oxide ALD and CVD coatings | Jennifer Y. Sun, Michael R. Rice | 2025-01-28 |
| 12115771 | Electronic devices with multilayer adhesive | Hoon Kim, Yuxi Zhao, Terry C. Lam, Yasmin F. Afsar, Chang-Chia Huang +3 more | 2024-10-15 |
| 12098107 | Methods of making nanopowders, nanoceramic materials and nanoceramic components | Guodong Zhan, Xiao-Ming He, Jennifer Y. Sun | 2024-09-24 |
| 12049696 | Plasma resistant process chamber lid | Jennifer Y. Sun, Michael R. Rice | 2024-07-30 |
| 12002657 | Multi-layer plasma resistant coating by atomic layer deposition | David Fenwick, Jennifer Y. Sun, Guodong Zhan | 2024-06-04 |
| 11667575 | Erosion resistant metal oxide coatings | Jennifer Y. Sun, Michael R. Rice | 2023-06-06 |
| 11667578 | Methods of making nanopowders, nanoceramic materials and nanoceramic components | Guodong Zhan, Xiao-Ming He, Jennifer Y. Sun | 2023-06-06 |
| 11639547 | Halogen resistant coatings and methods of making and using thereof | Prerna Goradia, Jennifer Y. Sun, Geetika Bajaj, Atul Bhaskar Chaudhari, Ankur Kadam | 2023-05-02 |
| 11562890 | Corrosion resistant ground shield of processing chamber | Dmitry Lubomirsky, Xiao-Ming He, Jennifer Y. Sun, Laksheswar Kalita, Soonam Park | 2023-01-24 |
| 11279656 | Nanopowders, nanoceramic materials and methods of making and use thereof | Guodong Zhan, Xiao-Ming He, Jennifer Y. Sun | 2022-03-22 |
| 11251023 | Multi-layer plasma resistant coating by atomic layer deposition | David Fenwick, Jennifer Y. Sun, Guodong Zhan | 2022-02-15 |
| 11180847 | Atomic layer deposition coatings for high temperature ceramic components | Jennifer Y. Sun, Michael R. Rice | 2021-11-23 |
| 11022333 | Control for device in a predetermined space area | Jianwei Zhao, Hon Ming Ng | 2021-06-01 |
| 11008653 | Multi-layer coating with diffusion barrier layer and erosion resistant layer | David Fenwick, Jennifer Y. Sun | 2021-05-18 |
| D907016 | Antenna mounting frame | Ziming He, Xiangjie Bian | 2021-01-05 |
| 10755900 | Multi-layer plasma erosion protection for chamber components | Toan Q. Tran, Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiao-Ming He +2 more | 2020-08-25 |
| 10573497 | Multi-layer plasma resistant coating by atomic layer deposition | David Fenwick, Jennifer Y. Sun, Guodong Zhan | 2020-02-25 |
| 10563303 | Metal oxy-flouride films based on oxidation of metal flourides | David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice | 2020-02-18 |
| 10443126 | Zone-controlled rare-earth oxide ALD and CVD coatings | Jennifer Y. Sun, Michael R. Rice | 2019-10-15 |
| 10443125 | Flourination process to create sacrificial oxy-flouride layer | David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice | 2019-10-15 |
| D853363 | Antenna | Bei Zheng, Xiangjie Bian | 2019-07-09 |
| D852785 | Antenna | Bei Zheng, Xiangjie Bian | 2019-07-02 |
| 10186400 | Multi-layer plasma resistant coating by atomic layer deposition | David Fenwick, Jennifer Y. Sun, Guodong Zhan | 2019-01-22 |
| D828341 | Antenna | Wei-Jen Chang, Bei Zheng, Ziming He, Simon Yang | 2018-09-11 |
| D824372 | Antenna | Bei Zheng, Wei-Jen Chang, Simon Yang | 2018-07-31 |