| 12322592 |
Deposition of silicon-based dielectric films |
Prerna Goradia, Seshadri Ganguli, Srinivas Gandikota, Robert Jan Visser, Suraj Rengarajan |
2025-06-03 |
| 12272607 |
Method of enhancing contrast while imaging high aspect ratio structures in electron microscopy |
Prerna Goradia, Robert Jan Visser |
2025-04-08 |
| 12004337 |
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools |
Gayatri Natu, Prerna Goradia, Darshan Thakare, David Fenwick, Xiaoming He +6 more |
2024-06-04 |
| 11976357 |
Methods for forming a protective coating on processing chamber surfaces or components |
Yogita Pareek, Prerna Goradia, Ankur Kadam |
2024-05-07 |
| 11639547 |
Halogen resistant coatings and methods of making and using thereof |
Prerna Goradia, Jennifer Y. Sun, Xiaowei Wu, Atul Bhaskar Chaudhari, Ankur Kadam |
2023-05-02 |
| 11547030 |
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools |
Gayatri Natu, Prerna Goradia, Darshan Thakare, David Fenwick, Xiaoming He +6 more |
2023-01-03 |
| 11540432 |
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools |
Gayatri Natu, Prerna Goradia, Darshan Thakare, David Fenwick, Xiaoming He +6 more |
2022-12-27 |
| 11390947 |
Method of forming a fluorinated metal film |
Nitin Deepak, Suresh Chand Seth, Prerna Goradia, Darshan Thakare, Jennifer Y. Sun +1 more |
2022-07-19 |
| 11359282 |
Methods for forming impurity free metal alloy films |
Darshan Thakare, Prerna Goradia, Robert Jan Visser, Yixiong Yang, Jacqueline S. Wrench +1 more |
2022-06-14 |
| 10886137 |
Selective nitride removal |
Prerna Goradia, Yogita Pareek, Robert Jan Visser, Nitin K. Ingle |
2021-01-05 |
| 10573527 |
Gas-phase selective etching systems and methods |
Robert Jan Visser, Nitin K. Ingle, Zihui Li, Prerna Goradia |
2020-02-25 |
| 10497573 |
Selective atomic layer etching of semiconductor materials |
Prerna Goradia, Fei Wang, Nitin K. Ingle, Zihui Li, Robert Jan Visser +1 more |
2019-12-03 |
| 10253406 |
Method for forming yttrium oxide on semiconductor processing equipment |
Laksheswar Kalita, Prerna Goradia, Yogita Pareek, Yixing Lin, Dmitry Lubomirsky +4 more |
2019-04-09 |
| 10233554 |
Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment |
Yogita Pareek, Laksheswar Kalita, Kevin A. PAPKE, Ankur Kadam, Bipin Thakur +3 more |
2019-03-19 |
| 10177002 |
Methods for chemical etching of silicon |
Ravindra Patil, Prerna Goradia, Robert Jan Visser |
2019-01-08 |
| 10074559 |
Selective poreseal deposition prevention and residue removal using SAM |
Tapash Chakraborty, Prerna Goradia, Robert Jan Visser, Bhaskar Kumar, Deenesh Padhi |
2018-09-11 |
| 9991129 |
Selective etching of amorphous silicon over epitaxial silicon |
Prerna Goradia, Robert Jan Visser |
2018-06-05 |
| 9257330 |
Ultra-thin structure to protect copper and method of preparation |
Amit Chatterjee, Pramit Manna, He Ren, Tapash Chakraborty, Srinivas D. Nemani +3 more |
2016-02-09 |
