| 12460298 |
Showerhead design to control stray deposition |
Akshay Dhanakshirur, Juan Carlos Rocha-Alvarez, Kaushik Alayavalli, Jay D. Pinson, II, Rick Kustra +7 more |
2025-11-04 |
|
| 12142468 |
Stress treatments for cover wafers |
Vinayak Vishwanath Hassan, Meng Cai, Sowjanya Musunuru, Kaushik Alayavalli, Andrew Nguyen |
2024-11-12 |
$39,712,000 |
| 12106958 |
Method of using dual frequency RF power in a process chamber |
Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Krishna Nittala, Pramit Manna +2 more |
2024-10-01 |
$68,865,000 |
| 12020911 |
Chucking process and system for substrate processing chambers |
Ganesh Balasubramanian, Vivek Shah, Jiheng Zhao |
2024-06-25 |
$57,214,000 |
| 11996273 |
Methods of seasoning process chambers |
Vinayak Vishwanath Hassan, Anup K. Singh |
2024-05-28 |
$67,076,000 |
| 11959174 |
Shunt door for magnets in plasma process chamber |
Kallol Bera, Sathya Swaroop Ganta, Timothy Joseph Franklin, Kaushik Alayavalli, Akshay Dhanakshirur +1 more |
2024-04-16 |
$82,852,000 |
| 11859275 |
Techniques to improve adhesion and defects for tungsten carbide film |
Vivek Shah, Anup K. Singh, Ganesh Balasubramanian |
2024-01-02 |
$40,045,000 |
| 11721545 |
Method of using dual frequency RF power in a process chamber |
Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Krishna Nittala, Pramit Manna +2 more |
2023-08-08 |
$46,911,000 |
| 11699585 |
Methods of forming hardmasks |
Jui-Yuan Hsu, Pramit Manna, Karthik Janakiraman |
2023-07-11 |
$39,838,000 |
| 11545376 |
Plasma parameters and skew characterization by high speed imaging |
Sidharth Bhatia, Edward P. Hammond, IV, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian |
2023-01-03 |
$39,123,000 |
| 11515191 |
Graded dimple height pattern on heater for lower backside damage and low chucking voltage |
Vivek Shah, Ganesh Balasubramanian |
2022-11-29 |
$23,914,000 |
| 11495440 |
Plasma density control on substrate edge |
Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more |
2022-11-08 |
$47,551,000 |
| 11488811 |
Chucking process and system for substrate processing chambers |
Ganesh Balasubramanian, Vivek Shah, Jiheng Zhao |
2022-11-01 |
$32,150,000 |
| 11120976 |
Apparatus and methods for removing contaminant particles in a plasma process |
Anup K. Singh, Vivek Shah, Sidharth Bhatia, Ganesh Balasubramanian |
2021-09-14 |
$84,054,000 |
| 11069514 |
Remote capacitively coupled plasma source with improved ion blocker |
Vivek Shah, Vinayak Vishwanath Hassan, Ganesh Balasubramanian |
2021-07-20 |
$88,311,000 |
| 10892143 |
Technique to prevent aluminum fluoride build up on the heater |
Vivek Shah, Anup K. Singh, Ganesh Balasubramanian |
2021-01-12 |
$84,921,000 |
| 10790121 |
Plasma density control on substrate edge |
Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more |
2020-09-29 |
$24,138,000 |
| 10748797 |
Plasma parameters and skew characterization by high speed imaging |
Sidharth Bhatia, Edward P. Hammond, IV, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian |
2020-08-18 |
$40,862,000 |
| 10714319 |
Apparatus and methods for removing contaminant particles in a plasma process |
Anup K. Singh, Vivek Shah, Sidharth Bhatia, Ganesh Balasubramanian |
2020-07-14 |
$28,056,000 |
| 10688538 |
Aluminum fluoride mitigation by plasma treatment |
Vivek Shah, Anup K. Singh, Ganesh Balasubramanian, Bok Hoen Kim |
2020-06-23 |
$29,749,000 |
| 10074559 |
Selective poreseal deposition prevention and residue removal using SAM |
Geetika Bajaj, Tapash Chakraborty, Prerna Goradia, Robert Jan Visser, Deenesh Padhi |
2018-09-11 |
$27,448,000 |
| 9793108 |
Interconnect integration for sidewall pore seal and via cleanliness |
He Ren, Mehul Naik, Deenesh Padhi, Priyanka DASH, Alexandros T. Demos |
2017-10-17 |
$65,021,000 |
| 9780223 |
Gallium arsenide based materials used in thin film transistor applications |
Kaushal K. Singh, Robert Jan Visser |
2017-10-03 |
$36,306,000 |
| 9646876 |
Aluminum nitride barrier layer |
Deenesh Padhi, Srinivas Guggilla, Alexandros T. Demos, He Ren, Priyanka DASH |
2017-05-09 |
$25,128,000 |
| 9252392 |
Thin film encapsulation-thin ultra high barrier layer for OLED application |
Dieter Haas |
2016-02-02 |
$8,701,000 |
