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Method and mechanism for contact-free process chamber characterization |
Chengxu Zhang |
2025-12-23 |
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| 12403253 |
System and method for monitoring fluid deficit |
Paul Byrne, Lee Smith, LEAH FANNING, Niraj Prasad Rauniyar, Nishant Khattar +1 more |
2025-09-02 |
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| 12357755 |
Fluid management system and method for controlling intracavity pressure |
LEAH FANNING, Paul Byrne, Niraj Prasad Rauniyar, Evan GYLLENHAAL, Nishant Khattar +1 more |
2025-07-15 |
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| 12327714 |
Plasma generation quality monitoring using multi-channel sensor data |
Jeremy Smith, Tao Zhang, John Poulose, Ghadeh Hadi |
2025-06-10 |
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| 12057333 |
Metrology slot plates |
Kenneth Brian Doering, Ashutosh Agarwal, Sanjeev Baluja, Shrihari Sampathkumar, Chunlei Zhang |
2024-08-06 |
$90,312,000 |
| 12020911 |
Chucking process and system for substrate processing chambers |
Bhaskar Kumar, Ganesh Balasubramanian, Jiheng Zhao |
2024-06-25 |
$57,214,000 |
| 11883626 |
Detection of an endoscope to a fluid management system |
Peter J. Pereira, Niraj Prasad Rauniyar |
2024-01-30 |
$42,000,000 |
| 11859275 |
Techniques to improve adhesion and defects for tungsten carbide film |
Anup K. Singh, Bhaskar Kumar, Ganesh Balasubramanian |
2024-01-02 |
$40,045,000 |
| 11850396 |
System and method for monitoring fluid deficit |
Paul Byrne, Lee Smith, LEAH FANNING, Niraj Prasad Rauniyar, Nishant Khattar +1 more |
2023-12-26 |
$29,645,000 |
| 11808746 |
Concentration sensor for precursor delivery system |
Varoujan Chakarian, Upendra Ummethala |
2023-11-07 |
$37,048,000 |
| 11545376 |
Plasma parameters and skew characterization by high speed imaging |
Sidharth Bhatia, Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Ganesh Balasubramanian |
2023-01-03 |
$39,123,000 |
| 11515191 |
Graded dimple height pattern on heater for lower backside damage and low chucking voltage |
Bhaskar Kumar, Ganesh Balasubramanian |
2022-11-29 |
$23,914,000 |
| 11495440 |
Plasma density control on substrate edge |
Bhaskar Kumar, Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Ganesh Balasubramanian +1 more |
2022-11-08 |
$47,551,000 |
| 11488811 |
Chucking process and system for substrate processing chambers |
Bhaskar Kumar, Ganesh Balasubramanian, Jiheng Zhao |
2022-11-01 |
$32,150,000 |
| 11235030 |
Platelet-derived growth factor compositions and methods for the treatment of tendinopathies |
Hans K. Kestler, Dean James Rager-Aguiar |
2022-02-01 |
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| 11120976 |
Apparatus and methods for removing contaminant particles in a plasma process |
Bhaskar Kumar, Anup K. Singh, Sidharth Bhatia, Ganesh Balasubramanian |
2021-09-14 |
$84,054,000 |
| 11069514 |
Remote capacitively coupled plasma source with improved ion blocker |
Vinayak Vishwanath Hassan, Bhaskar Kumar, Ganesh Balasubramanian |
2021-07-20 |
$88,311,000 |
| 10892143 |
Technique to prevent aluminum fluoride build up on the heater |
Bhaskar Kumar, Anup K. Singh, Ganesh Balasubramanian |
2021-01-12 |
$84,921,000 |
| 10790121 |
Plasma density control on substrate edge |
Bhaskar Kumar, Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Ganesh Balasubramanian +1 more |
2020-09-29 |
$24,138,000 |
| 10748797 |
Plasma parameters and skew characterization by high speed imaging |
Sidharth Bhatia, Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Ganesh Balasubramanian |
2020-08-18 |
$40,862,000 |
| 10714319 |
Apparatus and methods for removing contaminant particles in a plasma process |
Bhaskar Kumar, Anup K. Singh, Sidharth Bhatia, Ganesh Balasubramanian |
2020-07-14 |
$28,056,000 |
| 10688538 |
Aluminum fluoride mitigation by plasma treatment |
Anup K. Singh, Bhaskar Kumar, Ganesh Balasubramanian, Bok Hoen Kim |
2020-06-23 |
$29,749,000 |
| 10493130 |
Platelet-derived growth factor compositions and methods for the treatment of tendinopathies |
Hans K. Kestler, Dean James Rager-Aguiar |
2019-12-03 |
|
| 9934677 |
Method and apparatus for determination of sensor health |
Shaddy Abado, Xiaohui Hu, Devang Jagdish Gandhi, Christopher Schreiner |
2018-04-03 |
$15,700,000 |
| 9642892 |
Platelet-derived growth factor compositions and methods for the treatment of tendinopathies |
Hans K. Kestler, Dean James Rager-Aguiar |
2017-05-09 |
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