Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327714 | Plasma generation quality monitoring using multi-channel sensor data | Jeremy Smith, Tao Zhang, Vivek Shah, Ghadeh Hadi | 2025-06-10 |
| 12217938 | To an inductively coupled plasma source | James Rogers | 2025-02-04 |
| 11749505 | Methods and apparatus for processing a substrate | Kartik Ramaswamy | 2023-09-05 |
| 11538663 | Methods and apparatus for processing a substrate | Kartik Ramaswamy | 2022-12-27 |
| 11521828 | Inductively coupled plasma source | James Rogers | 2022-12-06 |
| 10283329 | ICP source for M and W-shape discharge profile control | Anurag Kumar Mishra, James Rogers | 2019-05-07 |