Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020911 | Chucking process and system for substrate processing chambers | Bhaskar Kumar, Ganesh Balasubramanian, Vivek Shah | 2024-06-25 |
| 11814716 | Faceplate having blocked center hole | Fang Ruan, Prashant Kumar Kulshreshtha, Diwakar Kedlaya | 2023-11-14 |
| 11613808 | Clean processes for boron carbon film deposition | Abdul Aziz Khaja, Prashant Kumar Kulshreshtha, Fang Ruan | 2023-03-28 |
| 11488811 | Chucking process and system for substrate processing chambers | Bhaskar Kumar, Ganesh Balasubramanian, Vivek Shah | 2022-11-01 |