Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255054 | Methods to eliminate of deposition on wafer bevel and backside | Venkata Sharat Chandra Parimi, Zubin Huang, Manjunath Veerappa Chobari Patil, Nitin Pathak, Yi Yang +3 more | 2025-03-18 |
| 12205818 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Zubin Huang +1 more | 2025-01-21 |
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Satish Radhakrishnan, Anton Baryshnikov, Venkatanarayana Shankaramurthy +3 more | 2024-08-13 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Zubin Huang +1 more | 2024-04-16 |
| 11939674 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Karthik Janakiraman, Aykut Aydin | 2024-03-26 |
| 11862475 | Gas mixer to enable RPS purging | Fang Ruan, Amit Kumar BANSAL, Venkata Sharat Chandra Parimi, Rajaram Narayanan, Badri Narayan Ramamurthi +3 more | 2024-01-02 |
| 11848178 | Optical absorption sensor for semiconductor processing | Fang Ruan | 2023-12-19 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more | 2023-11-28 |
| 11814716 | Faceplate having blocked center hole | Fang Ruan, Prashant Kumar Kulshreshtha, Jiheng Zhao | 2023-11-14 |
| 11810764 | Faceplate with edge flow control | Fang Ruan, Prashant Kumar Kulshreshtha, Rajaram Narayanan | 2023-11-07 |
| 11804363 | Chamber components for gas delivery modulation | Fang Ruan, Truong Van Nguyen, Mingle Tong, Sherry L. Mings, Venkata Sharat Chandra Parimi | 2023-10-31 |
| 11798820 | Gas delivery systems and methods | Fang Ruan, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli, Martin Jay Seamons +3 more | 2023-10-24 |
| 11682544 | Cover wafer for semiconductor processing chamber | Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Fang Ruan, Amit Kumar BANSAL | 2023-06-20 |
| 11618949 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Karthik Janakiraman, Aykut Aydin | 2023-04-04 |
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Hanish Kumar Panavalappil Kumarankutty, Prashant A. DESAI, Sumit Agarwal, Vidyadharan Srinivasa Murthy Bangalore, Truong Van Nguyen +1 more | 2023-03-07 |
| 11562902 | Hydrogen management in plasma deposited films | Rui Cheng, Karthik Janakiraman, Gautam K. Hemani, Krishna Nittala, Alicia J. Lustgraaf +4 more | 2023-01-24 |
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang +3 more | 2022-12-20 |
| 11527408 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Karthik Janakiraman, Zubin Huang, Meenakshi GUPTA +5 more | 2022-12-13 |
| 11495483 | Backside gas leakby for bevel deposition reduction | Venkata Sharat Chandra Parimi | 2022-11-08 |
| 11456173 | Methods for modifying photoresist profiles and tuning critical dimensions | Meenakshi GUPTA, Rui Cheng, Srinivas Guggilla, Karthik Janakiraman, Zubin Huang | 2022-09-27 |
| 11443919 | Film formation via pulsed RF plasma | Krishna Nittala, Karthik Janakiraman, Yi Yang, Rui Cheng | 2022-09-13 |
| 11430641 | Processing systems and methods to control process drift | Vivien Chua, Prashant Kumar Kulshreshtha, Zhijun Jiang, Fang Ruan | 2022-08-30 |
| 11315787 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Karthik Janakiraman, Zubin Huang, Meenakshi GUPTA +5 more | 2022-04-26 |
| 11009455 | Precursor delivery system and methods related thereto | Zubin Huang, Sarah White, Jonathan Bakke, Juan Carlos Rocha, Fang Ruan | 2021-05-18 |
| 10537965 | Fiber array line generator | Douglas E. Holmgren, Samuel C. Howells, Aaron Muir Hunter, Theodore P. Moffitt | 2020-01-21 |