Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125683 | Method to improve wafer edge uniformity | — | 2024-10-22 |
| 12068144 | Multi-stage pumping liner | — | 2024-08-20 |
| 11804363 | Chamber components for gas delivery modulation | Fang Ruan, Diwakar Kedlaya, Truong Van Nguyen, Sherry L. Mings, Venkata Sharat Chandra Parimi | 2023-10-31 |
| 11367594 | Multizone flow gasbox for processing chamber | Li-Qun Xia, Daemian Raj | 2022-06-21 |