Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255054 | Methods to eliminate of deposition on wafer bevel and backside | Venkata Sharat Chandra Parimi, Zubin Huang, Manjunath Veerappa Chobari Patil, Nitin Pathak, Yi Yang +3 more | 2025-03-18 |
| 11804363 | Chamber components for gas delivery modulation | Fang Ruan, Diwakar Kedlaya, Mingle Tong, Sherry L. Mings, Venkata Sharat Chandra Parimi | 2023-10-31 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more | 2023-10-17 |
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Hanish Kumar Panavalappil Kumarankutty, Prashant A. DESAI, Diwakar Kedlaya, Sumit Agarwal, Vidyadharan Srinivasa Murthy Bangalore +1 more | 2023-03-07 |
| 11017986 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more | 2021-05-25 |
| 5298869 | Constant current and constant voltage regulating circuit for common-gate or common-base transistor devices | Leon Jinich, R. Daniel Balusek | 1994-03-29 |