Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12030135 | Methods to fabricate chamber component holes using laser drilling | Timothy Joseph Franklin | 2024-07-09 |
| 11905583 | Gas quench for diffusion bonding | Joseph Behnke, Joseph F. Sommers | 2024-02-20 |
| 11851758 | Fabrication of a high temperature showerhead | Katherine Woo, Shawyon Jafari, Jian Li, Chidambara A. Ramalingam | 2023-12-26 |
| 11819948 | Methods to fabricate chamber component holes using laser drilling | Timothy Joseph Franklin, Joseph F. Sommers | 2023-11-21 |
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Hanish Kumar Panavalappil Kumarankutty, Prashant A. DESAI, Diwakar Kedlaya, Vidyadharan Srinivasa Murthy Bangalore, Truong Van Nguyen +1 more | 2023-03-07 |
| 11371148 | Fabricating a recursive flow gas distribution stack using multiple layers | Anantha K. Subramani, Yang Guo, Siva Chandrasekar | 2022-06-28 |
| 11332827 | Gas distribution plate with high aspect ratio holes and a high hole density | Sanjeev Baluja, Chad Peterson, Michael R. Rice | 2022-05-17 |
| 11111582 | Porous showerhead for a processing chamber | Chad Peterson, Marc Shull | 2021-09-07 |
| 9960052 | Methods for etching a metal layer to form an interconnection structure for semiconductor applications | Ann Chien, Chiu-pien KUO, Mark Hoinkis, Bradley J. Howard | 2018-05-01 |
| 9653320 | Methods for etching a hardmask layer for an interconnection structure for semiconductor applications | Chiu-pien KUO, Shang-Ting Hsieh, Guochuan Hong | 2017-05-16 |
| 9359679 | Methods for cyclically etching a metal layer for an interconnection structure for semiconductor applications | Bradley J. Howard | 2016-06-07 |
| 9090046 | Ceramic coated article and process for applying ceramic coating | Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Dmitry Lubomirsky | 2015-07-28 |
| 8932959 | Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material | Srinivas D. Nemani, Mang-Mang Ling, Jeremiah T. Pender, Kartik Ramaswamy, Andrew Nguyen +1 more | 2015-01-13 |