Issued Patents All Time
Showing 1–25 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195839 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2025-01-14 |
| 12162115 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2024-12-10 |
| 11773479 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2023-10-03 |
| 11724353 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2023-08-15 |
| 11680308 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2023-06-20 |
| 11587771 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Dmitry Lubomirsky | 2023-02-21 |
| 11578398 | Plasma spray coating design using phase and stress control | Jennifer Y. Sun, Yikai Chen | 2023-02-14 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11424136 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2022-08-23 |
| 11370078 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2022-06-28 |
| 11279661 | Heat treated ceramic substrate having ceramic coating | Jennifer Y. Sun, Ren-Guan Duan, Dmitry Lubomirsky | 2022-03-22 |
| 11053581 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2021-07-06 |
| 10934216 | Rare-earth oxide based chamber material | Jennifer Y. Sun | 2021-03-02 |
| 10930526 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2021-02-23 |
| 10818481 | Smart device fabrication via precision patterning | Jennifer Y. Sun, Yikai Chen, Vahid Firouzdor | 2020-10-27 |
| 10815562 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2020-10-27 |
| 10796888 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2020-10-06 |
| 10734202 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Jennifer Y. Sun, Tom K. Cho | 2020-08-04 |
| 10730798 | Slurry plasma spray of plasma resistant ceramic coating | Jennifer Y. Sun, Yikai Chen, Vahid Firouzdor | 2020-08-04 |
| 10604831 | Plasma spray coating design using phase and stress control | Jennifer Y. Sun, Yikai Chen | 2020-03-31 |
| 10584068 | Rare-earth oxide based chamber material | Jennifer Y. Sun | 2020-03-10 |
| 10577286 | Rare-earth oxide based chamber material | Jennifer Y. Sun | 2020-03-03 |
| 10563297 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Vahid Firouzdor | 2020-02-18 |