| 11773479 |
Plasma erosion resistant thin film coating for high temperature application |
Vahid Firouzdor, Biraja P. Kanungo, Jennifer Y. Sun, Jared Ahmad Lee |
2023-10-03 |
| 10815562 |
Plasma erosion resistant thin film coating for high temperature application |
Vahid Firouzdor, Biraja P. Kanungo, Jennifer Y. Sun, Jared Ahmad Lee |
2020-10-27 |
| 10573493 |
Inductively coupled plasma apparatus |
Valentin N. Todorow, Samer Banna, Ankur Agarwal, Zhigang Chen, TSE-CHIANG WANG +2 more |
2020-02-25 |
| 10468282 |
Method and apparatus for substrate transfer and radical confinement |
Jared Ahmad Lee, Paul B. Reuter, Imad Yousif, Aniruddha Pal |
2019-11-05 |
| 10010912 |
Particle reduction via throttle gate valve purge |
Jared Ahmad Lee, Dmitry Lubomirsky, Andrew Nguyen, Tom K. Cho, Eric A. Englhardt +1 more |
2018-07-03 |
| 9976211 |
Plasma erosion resistant thin film coating for high temperature application |
Vahid Firouzdor, Biraja P. Kanungo, Jennifer Y. Sun, Jared Ahmad Lee |
2018-05-22 |
| 9857027 |
Apparatus and method for self-regulating fluid chemical delivery |
Youqun Dong, David Thompson, Mei Chang |
2018-01-02 |
| 9514933 |
Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition |
Yu Lei, Srinivas Gandikota, Seshadri Ganguli, Bo Zheng, Rajkumar Jakkaraju +1 more |
2016-12-06 |
| 8616224 |
Methods and apparatus for providing a gas mixture to a pair of process chambers |
Jared Ahmad Lee, Ezra Robert Gold, James P. Cruse |
2013-12-31 |
| 8617351 |
Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction |
Daniel J. Hoffman, Roger Alan Lindley, Michael Kutney, Hamid Tavassoli, Keiji Horioka +1 more |
2013-12-31 |
| 8562742 |
Apparatus for radial delivery of gas to a chamber and methods of use thereof |
Jared Ahmad Lee, Ankur Agarwal, Ezra Robert Gold, James P. Cruse, Aniruddha Pal +1 more |
2013-10-22 |
| 7972469 |
Plasma processing apparatus |
Hiroji Hanawa, Andrew Nguyen, Keiji Horioka, Kallol Bera, Kenneth S. Collins +3 more |
2011-07-05 |
| 7741585 |
Integrated thermal unit having a shuttle with two-axis movement |
David H. Quach |
2010-06-22 |
| 7601934 |
Integrated thermal unit having a shuttle with a temperature controlled surface |
David H. Quach |
2009-10-13 |
| 7427728 |
Zone control heater plate for track lithography systems |
David H. Quach |
2008-09-23 |
| 7297906 |
Integrated thermal unit having a shuttle with two-axis movement |
David H. Quach |
2007-11-20 |
| 7282675 |
Integrated thermal unit having a shuttle with a temperature controlled surface |
David H. Quach |
2007-10-16 |
