Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10711348 | Apparatus to improve substrate temperature uniformity | Cheng-Hsiung Tsai, Manjunatha Koppa | 2020-07-14 |
| 9857027 | Apparatus and method for self-regulating fluid chemical delivery | Martin Jeff Salinas, David Thompson, Mei Chang | 2018-01-02 |