Issued Patents All Time
Showing 1–25 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1071886 | Substrate support for a substrate processing chamber | Zhixiu Liang, Michael S. Jackson, Jiang Lu, Tomoharu Matsushita, Zubin Huang | 2025-04-22 |
| 12228395 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Jallepally Ravi, Hiroyuki Takahama | 2025-02-18 |
| 12165920 | Semiconductor structure and method for forming the same | Hwei-Jay CHU, Chieh-Han Wu, Chung-Ju Lee | 2024-12-10 |
| D1040304 | Deposition ring for physical vapor deposition chamber | David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2024-08-27 |
| 12046551 | Interconnect structure having a barrier layer along the sidewall of self-aligned via structures | Chieh-Han Wu, Chih Wei Lu, Chung-Ju Lee | 2024-07-23 |
| 12014906 | High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber | William Johanson, Keith A. Miller, John C. Forster, Mukund Sundararajan | 2024-06-18 |
| 11961723 | Process kit having tall deposition ring for PVD chamber | David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2024-04-16 |
| 11955362 | Substrate support for reduced damage substrate backside | Joel M. Huston, Gwo-Chuan Tzu | 2024-04-09 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Lu Chen, Wenjing Xu +4 more | 2024-03-26 |
| 11887878 | Detachable biasable electrostatic chuck for high temperature applications | Shreesha Yogish Rao, Mukund Sundararajan, Manjunatha Koppa, Steven V. Sansoni | 2024-01-30 |
| 11854820 | Spacer etching process for integrated circuit design | Ru-Gun Liu, Chung-Ju Lee, Chih-Ming Lai, Chia-Ying Lee, Jyu-Horng Shieh +6 more | 2023-12-26 |
| 11848608 | Circuit and method for controlling switching regulator with ultrasonic mode | Chi-Kuang Chang | 2023-12-19 |
| 11830910 | Semiconductor structure having air gaps and method for manufacturing the same | Chieh-Han Wu, Hwei-Jay CHU, An-Dih Yu, Tzu-Hui Wei, Chung-Ju Lee +2 more | 2023-11-28 |
| 11772137 | Reactive cleaning of substrate support | Xi Chen, Shreesha Yogish Rao, Sheng Guo, Chi Hong Ching, Thomas Brezoczky | 2023-10-03 |
| 11676862 | Semiconductor device structure and methods of forming the same | Hwei-Jay CHU, Chieh-Han Wu, Hsin-Chieh Yao, Chung-Ju Lee | 2023-06-13 |
| 11631639 | Method of fabricating self-aligned via structures | Chieh-Han Wu, Chih Wei Lu, Chung-Ju Lee | 2023-04-18 |
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Ananthkrishna Jupudi, Tuck Foong Koh, Preetham Rao, Vinodh Ramachandran +3 more | 2023-04-18 |
| 11569124 | Interconnect structure having an etch stop layer over conductive lines | Chung-Ju Lee, Shau-Lin Shue, Tien-I Bao | 2023-01-31 |
| 11532547 | Interconnect structures with low-aspect-ratio contact vias | Ming-Han Lee, Chung-Ju Lee | 2022-12-20 |
| 11508610 | Substrate support with edge seal | Chang Ke, Bonnie T. Chia, Song-Moon Suh, Yuanhong Guo, Lei Zhou +1 more | 2022-11-22 |
| D960216 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Manjunatha Koppa, Steven V. Sansoni | 2022-08-09 |
| 11393718 | Semiconductor structure and method for forming the same | Hwei-Jay CHU, Chieh-Han Wu, Chih Wei Lu, Chung-Ju Lee | 2022-07-19 |
| D947914 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Manjunatha Koppa, Steven V. Sansoni | 2022-04-05 |
| 11251118 | Self-aligned via structures with barrier layers | Chieh-Han Wu, Chih Wei Lu, Chung-Ju Lee | 2022-02-15 |
| 11251028 | Pre-clean chamber with integrated shutter garage | Ananthkrishna Jupudi, Sarath Babu, Manjunatha Koppa, Hiroyuki Takahama | 2022-02-15 |