Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887878 | Detachable biasable electrostatic chuck for high temperature applications | Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2024-01-30 |
| 11772137 | Reactive cleaning of substrate support | Xi Chen, Sheng Guo, Chi Hong Ching, Thomas Brezoczky, Cheng-Hsiung Tsai | 2023-10-03 |
| D960216 | Base plate for a processing chamber substrate support | Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2022-08-09 |
| D947914 | Base plate for a processing chamber substrate support | Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2022-04-05 |
| 11024529 | System and method for residual voltage control of electrostatic chucking assemblies | John M. White | 2021-06-01 |
| D893441 | Base plate for a processing chamber substrate support | Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2020-08-18 |
| 10460969 | Bipolar electrostatic chuck and method for using the same | John M. White | 2019-10-29 |
| 10410899 | Bipolar electrostatic chuck and method for using the same | John M. White | 2019-09-10 |
| 10184183 | Substrate temperature monitoring | — | 2019-01-22 |