Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112890 | Top magnets for decreased non-uniformity in PVD | Borui Xia, Anthony Chih-Tung Chan, Shiyu YUE, Wei-Sheng Lei, Aravind Kamath +2 more | 2024-10-08 |
| 12014906 | High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber | William Johanson, Keith A. Miller, Cheng-Hsiung Tsai, John C. Forster | 2024-06-18 |
| 11887878 | Detachable biasable electrostatic chuck for high temperature applications | Shreesha Yogish Rao, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2024-01-30 |
| D960216 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2022-08-09 |
| D947914 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2022-04-05 |
| 10945313 | Methods and apparatus for a microwave batch curing process | Saket Rathi, Ananthkrishna Jupudi, Manjunath H. Venkataswamappa | 2021-03-09 |
| D893441 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2020-08-18 |
| 10373860 | Batch processing apparatus | Ananthkrishna Jupudi, Manjunatha Koppa, Saket Rathi | 2019-08-06 |