Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D942516 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Steven V. Sansoni, David T. Or | 2022-02-01 |
| D933725 | Deposition ring for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Steven V. Sansoni, David T. Or | 2021-10-19 |
| 10945313 | Methods and apparatus for a microwave batch curing process | Saket Rathi, Ananthkrishna Jupudi, Mukund Sundararajan | 2021-03-09 |
| D891382 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Cheng-Hsiung Tsai, Steven V. Sansoni, David T. Or | 2020-07-28 |