Issued Patents All Time
Showing 25 most recent of 252 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1013378 | Roll-aboard travel bag | — | 2024-02-06 |
| 11692268 | Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition | Soo Young Choi, Robert I. Greene | 2023-07-04 |
| 11532418 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Jozef Kudela, Carl A. Sorensen | 2022-12-20 |
| 11291281 | Roll-aboard garment bag | — | 2022-04-05 |
| 11024529 | System and method for residual voltage control of electrostatic chucking assemblies | Shreesha Yogish Rao | 2021-06-01 |
| 10886053 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Jozef Kudela, Carl A. Sorensen | 2021-01-05 |
| 10676817 | Flip edge shadow frame | Qunhua Wang, Soo Young Choi, Robin L. Tiner, Gaku Furuta, Beom Soo Park | 2020-06-09 |
| 10648080 | Full-area counter-flow heat exchange substrate support | — | 2020-05-12 |
| 10559730 | Collimated LED light field display | Manivannan Thothadri, Christopher Dennis Bencher, Robert Jan Visser | 2020-02-11 |
| 10490599 | Collimated, directional micro-LED light field display | Manivannan Thothadri, Christopher Dennis Bencher, Robert Jan Visser | 2019-11-26 |
| 10460969 | Bipolar electrostatic chuck and method for using the same | Shreesha Yogish Rao | 2019-10-29 |
| 10453718 | Slit valve door with moving mating part | Mehran Behdjat, Shinichi Kurita, Suhail Anwar, Makoto Inagawa | 2019-10-22 |
| 10410899 | Bipolar electrostatic chuck and method for using the same | Shreesha Yogish Rao | 2019-09-10 |
| 10379450 | Apparatus and methods for on-the-fly digital exposure image data modification | Benjamin M. Johnston, Thomas Laidig, Jang Fung Chen | 2019-08-13 |
| 10312058 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, Qunhua Wang, Li Hou, Ki Woon Kim, Shinichi Kurita +4 more | 2019-06-04 |
| 10304607 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Jozef Kudela, Carl A. Sorensen | 2019-05-28 |
| 10304713 | Substrate carrier with integrated electrostatic chuck | Zuoqian Wang | 2019-05-28 |
| 10297483 | Substrate carrier with integrated electrostatic chuck | Zuoqian Wang | 2019-05-21 |
| 10262837 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, Qunhua Wang, Li Hou, Ki Woon Kim, Shinichi Kurita +4 more | 2019-04-16 |
| 10256382 | Collimated OLED light field display | Christopher Dennis Bencher, Manivannan Thothadri, Robert Jan Visser | 2019-04-09 |
| 10233528 | Mask for deposition system and method for using the mask | Robert Jan Visser | 2019-03-19 |
| 10190693 | Door seal for vacuum chamber | — | 2019-01-29 |
| 10184179 | Atomic layer deposition processing chamber permitting low-pressure tool replacement | Shinichi Kurita, Jozef Kudela, Dieter Haas | 2019-01-22 |
| 10153191 | Substrate carrier system and method for using the same | Zuoqian Wang | 2018-12-11 |
| 10126790 | Dual loop susceptor temperature control system | — | 2018-11-13 |