| D1013378 |
Roll-aboard travel bag |
— |
2024-02-06 |
|
| 11692268 |
Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition |
Soo Young Choi, Robert I. Greene |
2023-07-04 |
|
| 11532418 |
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus |
Jozef Kudela, Carl A. Sorensen |
2022-12-20 |
$39,023,000 |
| 11291281 |
Roll-aboard garment bag |
— |
2022-04-05 |
|
| 11024529 |
System and method for residual voltage control of electrostatic chucking assemblies |
Shreesha Yogish Rao |
2021-06-01 |
$74,932,000 |
| 10886053 |
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus |
Jozef Kudela, Carl A. Sorensen |
2021-01-05 |
$38,335,000 |
| 10676817 |
Flip edge shadow frame |
Qunhua Wang, Soo Young Choi, Robin L. Tiner, Gaku Furuta, Beom Soo Park |
2020-06-09 |
$53,212,000 |
| 10648080 |
Full-area counter-flow heat exchange substrate support |
— |
2020-05-12 |
$50,210,000 |
| 10559730 |
Collimated LED light field display |
Manivannan Thothadri, Christopher Dennis Bencher, Robert Jan Visser |
2020-02-11 |
$47,813,000 |
| 10490599 |
Collimated, directional micro-LED light field display |
Manivannan Thothadri, Christopher Dennis Bencher, Robert Jan Visser |
2019-11-26 |
$24,423,000 |
| 10460969 |
Bipolar electrostatic chuck and method for using the same |
Shreesha Yogish Rao |
2019-10-29 |
$23,960,000 |
| 10453718 |
Slit valve door with moving mating part |
Mehran Behdjat, Shinichi Kurita, Suhail Anwar, Makoto Inagawa |
2019-10-22 |
$16,291,000 |
| 10410899 |
Bipolar electrostatic chuck and method for using the same |
Shreesha Yogish Rao |
2019-09-10 |
$15,043,000 |
| 10379450 |
Apparatus and methods for on-the-fly digital exposure image data modification |
Benjamin M. Johnston, Thomas Laidig, Jang Fung Chen |
2019-08-13 |
$55,265,000 |
| 10312058 |
Plasma uniformity control by gas diffuser hole design |
Soo Young Choi, Qunhua Wang, Li Hou, Ki Woon Kim, Shinichi Kurita +4 more |
2019-06-04 |
$18,308,000 |
| 10304607 |
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus |
Jozef Kudela, Carl A. Sorensen |
2019-05-28 |
$34,437,000 |
| 10304713 |
Substrate carrier with integrated electrostatic chuck |
Zuoqian Wang |
2019-05-28 |
$34,437,000 |
| 10297483 |
Substrate carrier with integrated electrostatic chuck |
Zuoqian Wang |
2019-05-21 |
$30,257,000 |
| 10262837 |
Plasma uniformity control by gas diffuser hole design |
Soo Young Choi, Qunhua Wang, Li Hou, Ki Woon Kim, Shinichi Kurita +4 more |
2019-04-16 |
$29,421,000 |
| 10256382 |
Collimated OLED light field display |
Christopher Dennis Bencher, Manivannan Thothadri, Robert Jan Visser |
2019-04-09 |
$19,096,000 |
| 10233528 |
Mask for deposition system and method for using the mask |
Robert Jan Visser |
2019-03-19 |
$17,059,000 |
| 10190693 |
Door seal for vacuum chamber |
— |
2019-01-29 |
$20,450,000 |
| 10184179 |
Atomic layer deposition processing chamber permitting low-pressure tool replacement |
Shinichi Kurita, Jozef Kudela, Dieter Haas |
2019-01-22 |
$28,931,000 |
| 10153191 |
Substrate carrier system and method for using the same |
Zuoqian Wang |
2018-12-11 |
$26,076,000 |
| 10126790 |
Dual loop susceptor temperature control system |
— |
2018-11-13 |
$24,133,000 |
