Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12061422 | Method for fast loading substrates in a flat panel tool | Preston Fung, Sean Screws, Cheuk Ming LEE, Jae Myung YOO | 2024-08-13 |
| 11009801 | Dynamic cooling control for thermal stabilization for lithography system | David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao, Antoine P. Manens | 2021-05-18 |
| 10901328 | Method for fast loading substrates in a flat panel tool | Preston Fung, Sean Screws, Cheuk Ming LEE, Jae Myung YOO | 2021-01-26 |
| 10788762 | Dynamic cooling control for thermal stabilization for lithography system | David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao, Antoine P. Manens | 2020-09-29 |
| 10379450 | Apparatus and methods for on-the-fly digital exposure image data modification | Thomas Laidig, Jang Fung Chen, John M. White | 2019-08-13 |
| 10036966 | Environmental control of systems for photolithography process | John M. White, Thomas Laidig | 2018-07-31 |
| 10031427 | Methods and apparatus for vibration damping stage | Jeffrey Kaskey, Thomas Laidig | 2018-07-24 |
| 9927723 | Apparatus and methods for on-the-fly digital exposure image data modification | Thomas Laidig, Jang Fung Chen, John M. White | 2018-03-27 |
| 9820372 | Segmented antenna assembly | — | 2017-11-14 |
| 9315900 | Isolation of microwave sources through bellows | Shinichi Kurita | 2016-04-19 |
| 7973546 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more | 2011-07-05 |
| 7919972 | Integrated substrate transfer module | Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Fayez E. Abboud | 2011-04-05 |
| 7847566 | Configurable prober for TFT LCD array test | Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Paul Bocian +1 more | 2010-12-07 |
| 7786742 | Prober for electronic device testing on large area substrates | Sriram Krishnaswami, Matthias Brunner, William Beaton, Yong Liu, Hung T. Nguyen +2 more | 2010-08-31 |
| 7746088 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more | 2010-06-29 |
| 7602199 | Mini-prober for TFT-LCD testing | Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Yong Liu | 2009-10-13 |
| 7535238 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more | 2009-05-19 |
| 7355418 | Configurable prober for TFT LCD array test | Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez E. Abboud, Paul Bocian +1 more | 2008-04-08 |
| 7330021 | Integrated substrate transfer module | Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Fayez E. Abboud | 2008-02-12 |
| 7319335 | Configurable prober for TFT LCD array testing | Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Paul Bocian +1 more | 2008-01-15 |
| 6833717 | Electron beam test system with integrated substrate transfer module | Shinichi Kurita, Emanuel Beer, Hung T. Nguyen | 2004-12-21 |