| 12486689 |
Elevated tank tower |
Martin L. Smith |
2025-12-02 |
|
| 12061422 |
Method for fast loading substrates in a flat panel tool |
Preston Fung, Sean Screws, Cheuk Ming LEE, Jae Myung YOO |
2024-08-13 |
$69,975,000 |
| 11009801 |
Dynamic cooling control for thermal stabilization for lithography system |
David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao, Antoine P. Manens |
2021-05-18 |
$51,490,000 |
| 10901328 |
Method for fast loading substrates in a flat panel tool |
Preston Fung, Sean Screws, Cheuk Ming LEE, Jae Myung YOO |
2021-01-26 |
$35,448,000 |
| 10788762 |
Dynamic cooling control for thermal stabilization for lithography system |
David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao, Antoine P. Manens |
2020-09-29 |
$24,138,000 |
| 10379450 |
Apparatus and methods for on-the-fly digital exposure image data modification |
Thomas Laidig, Jang Fung Chen, John M. White |
2019-08-13 |
$55,265,000 |
| 10036966 |
Environmental control of systems for photolithography process |
John M. White, Thomas Laidig |
2018-07-31 |
$55,966,000 |
| 10031427 |
Methods and apparatus for vibration damping stage |
Jeffrey Kaskey, Thomas Laidig |
2018-07-24 |
$37,876,000 |
| 9927723 |
Apparatus and methods for on-the-fly digital exposure image data modification |
Thomas Laidig, Jang Fung Chen, John M. White |
2018-03-27 |
$21,583,000 |
| 9820372 |
Segmented antenna assembly |
— |
2017-11-14 |
$27,960,000 |
| 9315900 |
Isolation of microwave sources through bellows |
Shinichi Kurita |
2016-04-19 |
$19,369,000 |
| 7973546 |
In-line electron beam test system |
Fayez E. Abboud, Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more |
2011-07-05 |
$5,297,000 |
| 7919972 |
Integrated substrate transfer module |
Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Fayez E. Abboud |
2011-04-05 |
$30,439,000 |
| 7847566 |
Configurable prober for TFT LCD array test |
Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Paul Bocian +1 more |
2010-12-07 |
$3,240,000 |
| 7786742 |
Prober for electronic device testing on large area substrates |
Sriram Krishnaswami, Matthias Brunner, William Beaton, Yong Liu, Hung T. Nguyen +2 more |
2010-08-31 |
$13,689,000 |
| 7746088 |
In-line electron beam test system |
Fayez E. Abboud, Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more |
2010-06-29 |
$7,165,000 |
| 7602199 |
Mini-prober for TFT-LCD testing |
Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Yong Liu |
2009-10-13 |
$11,309,000 |
| 7535238 |
In-line electron beam test system |
Fayez E. Abboud, Sriram Krishnaswami, Hung T. Nguyen, Matthias Brunner, Ralf Schmid +3 more |
2009-05-19 |
$24,403,000 |
| 7355418 |
Configurable prober for TFT LCD array test |
Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez E. Abboud, Paul Bocian +1 more |
2008-04-08 |
$17,034,000 |
| 7330021 |
Integrated substrate transfer module |
Shinichi Kurita, Emanuel Beer, Hung T. Nguyen, Fayez E. Abboud |
2008-02-12 |
$31,292,000 |
| 7319335 |
Configurable prober for TFT LCD array testing |
Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Paul Bocian +1 more |
2008-01-15 |
$53,160,000 |
| 6833717 |
Electron beam test system with integrated substrate transfer module |
Shinichi Kurita, Emanuel Beer, Hung T. Nguyen |
2004-12-21 |
$24,351,000 |
