| 10114297 |
Active eye-to-eye with alignment by X-Y capacitance measurement |
Thomas Laidig |
2018-10-30 |
| 10031427 |
Methods and apparatus for vibration damping stage |
Benjamin M. Johnston, Thomas Laidig |
2018-07-24 |
| 9907152 |
Illumination system with monitoring optical output power |
Thomas Laidig, David A. Markle, Jang Fung Chen |
2018-02-27 |
| 9733573 |
Optical projection array exposure system |
David A. Markle, Thomas Laidig, Jang Fung Chen |
2017-08-15 |
| 9250509 |
Optical projection array exposure system |
David A. Markle, Thomas Laidig, Jang Fung Chen |
2016-02-02 |
| 8914143 |
Method and system for handling substrates |
Thomas Laidig, Dave Markle, Jang Fung Chen |
2014-12-16 |
| 5979955 |
Vertical extraction tool for semiconductor packaged devices |
Mary Jane Krebser, Vernon P. Bollesen, James A. Jones |
1999-11-09 |
| 5166822 |
Light beam frequency comb generator |
Gordon J. Priatko |
1992-11-24 |
| 4881190 |
Digitally programmable signal generator and method |
Gordon J. Priatko |
1989-11-14 |