Issued Patents All Time
Showing 1–25 of 94 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379676 | Package imaging for die location correction in digital lithography | Ulrich Mueller, Hsiu-Jen Wang, Shih-Hao Kuo | 2025-08-05 |
| 12248254 | Universal metrology file, protocol, and process for maskless lithography systems | Tamer Coskun, Douglas Van Den Broeke | 2025-03-11 |
| 12032284 | Advanced-packaging high-volume-mode digital-lithography-tool | Shih-Hao Kuo, Hsiu-Jen Wang, Ulrich Mueller | 2024-07-09 |
| 11934107 | Maskless based lithography methods | Shih-Hsien LEE, Tingwei Chiu, Frederick Lie | 2024-03-19 |
| 11592740 | Wire grid polarizer manufacturing methods using frequency doubling interference lithography | Christopher Dennis Bencher, David A. Markle | 2023-02-28 |
| 10983389 | Wire grid polarizer manufacturing method | David A. Markle | 2021-04-20 |
| 10935892 | Freeform distortion correction | Tamer Coskun, Thomas Laidig | 2021-03-02 |
| 10908507 | Micro LED array illumination source | Christopher Dennis Bencher | 2021-02-02 |
| 10497658 | Method of pattern placement correction | Tamer Coskun | 2019-12-03 |
| 10379450 | Apparatus and methods for on-the-fly digital exposure image data modification | Benjamin M. Johnston, Thomas Laidig, John M. White | 2019-08-13 |
| 10115687 | Method of pattern placement correction | Tamer Coskun | 2018-10-30 |
| 9927723 | Apparatus and methods for on-the-fly digital exposure image data modification | Benjamin M. Johnston, Thomas Laidig, John M. White | 2018-03-27 |
| 9907152 | Illumination system with monitoring optical output power | Jeffrey Kaskey, Thomas Laidig, David A. Markle | 2018-02-27 |
| 9733573 | Optical projection array exposure system | David A. Markle, Thomas Laidig, Jeffrey Kaskey | 2017-08-15 |
| 9519226 | Optical imaging writer system | Thomas Laidig | 2016-12-13 |
| 9507271 | System and method for manufacturing multiple light emitting diodes in parallel | Thomas Laidig | 2016-11-29 |
| 9405203 | Pixel blending for multiple charged-particle beam lithography | Thomas Laidig | 2016-08-02 |
| 9361400 | Method of improved hierarchical XML databases | Leo Lilin Zhao, Joseph Werner De Vocht | 2016-06-07 |
| 9250509 | Optical projection array exposure system | David A. Markle, Thomas Laidig, Jeffrey Kaskey | 2016-02-02 |
| 9158190 | Optical imaging writer system | Thomas Laidig | 2015-10-13 |
| 9025136 | System and method for manufacturing three dimensional integrated circuits | Thomas Laidig | 2015-05-05 |
| 8914143 | Method and system for handling substrates | Jeffrey Kaskey, Thomas Laidig, Dave Markle | 2014-12-16 |
| 8910091 | Method, program product and apparatus for performing double exposure lithography | Duan-Fu Stephen Hsu, Douglas Van Den Broeke | 2014-12-09 |
| 8670106 | Optical imaging writer system | Thomas Laidig | 2014-03-11 |
| 8644589 | Method and apparatus for performing model-based OPC for pattern decomposed features | Duan-Fu Stephen Hsu, Jungchul PARK, Doug Van Den Broeke | 2014-02-04 |