Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8644589 | Method and apparatus for performing model-based OPC for pattern decomposed features | Duan-Fu Stephen Hsu, Jungchul PARK, Jang Fung Chen | 2014-02-04 |
| 7667216 | Method of achieving CD linearity control for full-chip CPL manufacturing | Chungwei Hsu, Jang Fung Chen | 2010-02-23 |
| 7549140 | Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography | Jang Fung Chen, Thomas Laidig, Kurt E. Wampler, Stephen Hsu | 2009-06-16 |
| 7421677 | Illuminator controlled tone reversal printing | Steven George Hansen | 2008-09-02 |
| 6851103 | Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography | Jang Fung Chen, Thomas Laidig, Kurt E. Wampler, Stephen Hsu | 2005-02-01 |
| 6567719 | Method and apparatus for creating an improved image on a photomask by negatively and positively overscanning the boundaries of an image pattern at inside corner locations | — | 2003-05-20 |
| 6360134 | Method for creating and improved image on a photomask by negatively and positively overscanning the boundaries of an image pattern at inside corner locations | — | 2002-03-19 |