Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7667216 | Method of achieving CD linearity control for full-chip CPL manufacturing | Doug Van Den Broeke, Jang Fung Chen | 2010-02-23 |
| 7211815 | Method of achieving CD linearity control for full-chip CPL manufacturing | Doug Broeke, Jang Fung Chen | 2007-05-01 |
| 6215546 | Method of optical correction for improving the pattern shrinkage caused by scattering of the light | Ronfu Chu, Quentin Chen, Jengping Lin | 2001-04-10 |
| 6083807 | Overlay measuring mark and its method | — | 2000-07-04 |