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Doug Broeke

AB Asml Masktools B.V.: 1 patents #29 of 37Top 80%
Overall (All Time): #2,157,114 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7211815 Method of achieving CD linearity control for full-chip CPL manufacturing Chungwei Hsu, Jang Fung Chen 2007-05-01
6139994 Use of intersecting subresolution features for microlithography Fung Bor Chen 2000-10-31