Stephen Hsu — 11 Patents at Asml Masktools B.V.

Stephen Hsu has been granted 11 US patents while listed as an inventor at Asml Masktools B.V.. The first was granted in 2003 and the most recent in August 2010. Stephen Hsu ranks #435,149 of 4,157,543 US inventors in our database (top 10.5%). Patent records list Stephen Hsu in Fremont, CA, US.

Issued Patents All Time

Showing 1–11 of 11 patents

Patent #	Title	Co-Inventors	Date
7774736	Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography	Douglas Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler	2010-08-10
7725872	Orientation dependent shielding for use with dipole illumination techniques	Noel Corcoran, Jang Fung Chen	2010-05-25
7549140	Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography	Doug Van Den Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler	2009-06-16
7523438	Method for improved lithographic patterning utilizing optimized illumination conditions and high transmission attenuated PSM	Michael S. Hsu, Thomas Laidig, Douglas Van Den Broeke, Jang Fung Chen	2009-04-21
7514183	Method for performing transmission tuning of a mask pattern to improve process latitude	Jang Fung Chen, Xuelong Shi, Douglas Van Den Broeke	2009-04-07
7247574	Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography	Douglas Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler	2007-07-24
7246342	Orientation dependent shielding for use with dipole illumination techniques	Noel Corcoran, Jang Fung Chen	2007-07-17
6951701	Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM	Michael S. Hsu, Thomas Laidig, Douglas Van Den Broeke, Jang Fung Chen	2005-10-04
6915505	Method and apparatus for performing rule-based gate shrink utilizing dipole illumination	Noel Corcoran, Jang Fung Chen	2005-07-05
6851103	Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography	Doug Van Den Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler	2005-02-01
6519760	Method and apparatus for minimizing optical proximity effects	Xuelong Shi, Jang Fung Chen	2003-02-11

Stephen Hsu — 11 Patents

Issued Patents All Time

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