| 7774736 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography |
Douglas Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler |
2010-08-10 |
| 7725872 |
Orientation dependent shielding for use with dipole illumination techniques |
Noel Corcoran, Jang Fung Chen |
2010-05-25 |
| 7549140 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography |
Doug Van Den Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler |
2009-06-16 |
| 7523438 |
Method for improved lithographic patterning utilizing optimized illumination conditions and high transmission attenuated PSM |
Michael S. Hsu, Thomas Laidig, Douglas Van Den Broeke, Jang Fung Chen |
2009-04-21 |
| 7514183 |
Method for performing transmission tuning of a mask pattern to improve process latitude |
Jang Fung Chen, Xuelong Shi, Douglas Van Den Broeke |
2009-04-07 |
| 7247574 |
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography |
Douglas Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler |
2007-07-24 |
| 7246342 |
Orientation dependent shielding for use with dipole illumination techniques |
Noel Corcoran, Jang Fung Chen |
2007-07-17 |
| 6951701 |
Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM |
Michael S. Hsu, Thomas Laidig, Douglas Van Den Broeke, Jang Fung Chen |
2005-10-04 |
| 6915505 |
Method and apparatus for performing rule-based gate shrink utilizing dipole illumination |
Noel Corcoran, Jang Fung Chen |
2005-07-05 |
| 6851103 |
Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography |
Doug Van Den Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler |
2005-02-01 |
| 6519760 |
Method and apparatus for minimizing optical proximity effects |
Xuelong Shi, Jang Fung Chen |
2003-02-11 |