| 7985515 |
Method and apparatus for performing model-based layout conversion for use with dipole illumination |
Duan-Fu Stephen Hsu, Kurt E. Wampler, Markus Franciscus Antonius Eurlings, Jang Fung Chen |
2011-07-26 |
| 7725872 |
Orientation dependent shielding for use with dipole illumination techniques |
Stephen Hsu, Jang Fung Chen |
2010-05-25 |
| 7666554 |
Method and apparatus for performing model-based layout conversion for use with dipole illumination |
Duan-Fu Stephen Hsu, Kurt E. Wampler, Markus Franciscus Antonius Eurlings, Jang Fung Chen |
2010-02-23 |
| 7617476 |
Method for performing pattern pitch-split decomposition utilizing anchoring features |
Duan-Fu Stephen Hsu, Jang Fung Chen, Douglas Van Den Broeke |
2009-11-10 |
| 7246342 |
Orientation dependent shielding for use with dipole illumination techniques |
Stephen Hsu, Jang Fung Chen |
2007-07-17 |
| 7138212 |
Method and apparatus for performing model-based layout conversion for use with dipole illumination |
Duan-Fu Stephen Hsu, Kurt E. Wampler, Markus Franciscus Antonius Eurlings, Jang Fung Chen |
2006-11-21 |
| 6915505 |
Method and apparatus for performing rule-based gate shrink utilizing dipole illumination |
Stephen Hsu, Jang Fung Chen |
2005-07-05 |