Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835862 | Model for calculating a stochastic variation in an arbitrary pattern | — | 2023-12-05 |
| 11354484 | Failure model for predicting failure due to resist layer | — | 2022-06-07 |
| 11126090 | Model for calculating a stochastic variation in an arbitrary pattern | — | 2021-09-21 |
| 11029594 | Optimization of a lithography apparatus or patterning process based on selected aberration | Kateryna Stanislavovna Lyakhova, Paulus Jacobus Maria VAN ADRICHEM | 2021-06-08 |
| 10795267 | Model for estimating stochastic variation | — | 2020-10-06 |
| 10545411 | Model for calculating a stochastic variation in an arbitrary pattern | — | 2020-01-28 |
| 9934346 | Source mask optimization to reduce stochastic effects | — | 2018-04-03 |
| 9651875 | Illumination system and lithographic apparatus | Heine Melle Mulder, Johannes Catharinus Hubertus Mulkens, Markus Deguenther | 2017-05-16 |
| 9563135 | Process tuning with polarization | Heine Melle Mulder, Tsann-Bim Chiou | 2017-02-07 |
| 9213783 | Source mask optimization to reduce stochastic effects | — | 2015-12-15 |
| 9116439 | Illumination system and lithographic apparatus | Heine Melle Mulder, Johannes Catharinus Hubertus Mulkens, Markus Deguenther | 2015-08-25 |
| 8982324 | Polarization designs for lithographic apparatus | — | 2015-03-17 |
| 8786824 | Source-mask optimization in lithographic apparatus | — | 2014-07-22 |
| 8576377 | Lithographic apparatus and device manufacturing method | Heine Melle Mulder, Robert Kazinczi | 2013-11-05 |
| 8074947 | Method of using long-handed garden tools, each provided with a reconfigurable garden tool caddy device | James J. Cella | 2011-12-13 |
| 8043797 | Lithographic apparatus and device manufacturing method | — | 2011-10-25 |
| 7981595 | Reduced pitch multiple exposure process | Theodore Paxton, Todd Davis, Todd Hiar, Cassandra Owen, James J. Hunter | 2011-07-19 |
| 7906270 | Reduced pitch multiple exposure process | Theodore Paxton, Todd Davis, Todd Hiar, Cassandra Owen | 2011-03-15 |
| 7898644 | Lithographic apparatus and device manufacturing method | — | 2011-03-01 |
| 7781149 | Reduced pitch multiple exposure process | Theodore Paxton, Cassandra Owen, Todd Davis, Todd Hiar, James J. Hunter | 2010-08-24 |
| 7684013 | Lithographic apparatus and device manufacturing method | Donis Flagello, Wolfgang Singer, Bernd Geh, Vladan Blahnik | 2010-03-23 |
| 7528934 | Lithographic apparatus and device manufacturing method | — | 2009-05-05 |
| 7496882 | Optimization to avoid sidelobe printing | — | 2009-02-24 |
| 7471375 | Correction of optical proximity effects by intensity modulation of an illumination arrangement | Jozef Maria Finders, Luis Alberto Colina Santamaria Colina | 2008-12-30 |
| 7421677 | Illuminator controlled tone reversal printing | Doug Van Den Broeke | 2008-09-02 |