Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8937705 | Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device | Wim Tjibbo Tel, Hans Van Der Laan, Cassandra Owen, Todd Hiar, Theodore Paxton | 2015-01-20 |
| 7981595 | Reduced pitch multiple exposure process | Theodore Paxton, Todd Hiar, Cassandra Owen, Steven George Hansen, James J. Hunter | 2011-07-19 |
| 7906270 | Reduced pitch multiple exposure process | Theodore Paxton, Todd Hiar, Cassandra Owen, Steven George Hansen | 2011-03-15 |
| 7781149 | Reduced pitch multiple exposure process | Theodore Paxton, Steven George Hansen, Cassandra Owen, Todd Hiar, James J. Hunter | 2010-08-24 |
| 7738075 | Lithographic attribute enhancement | Todd Hiar, Theodore Paxton, Cassandra Owen | 2010-06-15 |
| 7274429 | Integrated lithographic fabrication cluster | Theodore Paxton, Todd Hiar | 2007-09-25 |
| 6958476 | Methods to improve resolution of cross sectioned features created using an ion beam | Theodore Paxton | 2005-10-25 |
| 6872014 | Method for developing a photoresist pattern | Theodore Paxton | 2005-03-29 |
| 6873938 | Adaptive lithographic critical dimension enhancement | Theodore Paxton, Todd Hiar, Wim Tjibbo Tel | 2005-03-29 |